公开(公告)号：SG11202001658YA

公开(公告)日：2020-03-30

申请号：SG11202001658Y

申请日：2018-08-23

Applicant: LAM RES CORP

Inventor： SHOEB JULINE ,  WU YING ,  PATERSON ALEX

IPC: H01J37/32

Abstract: Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of the RF generators. The pulsing of the RF generators facilitates a transfer of ion energy during one of the states to another one of the states for increasing ion energy during the other state to further increase a rate of processing a substrate.