公开(公告)号：WO2011063262A2

公开(公告)日：2011-05-26

申请号：PCT/US2010057478

申请日：2010-11-19

Applicant: LAM RES CORP ,  VALCORE JOHN C JR ,  ROGERS JAMES

Inventor： VALCORE JOHN C JR ,  ROGERS JAMES

IPC: H01L21/66 ,  H01L21/3065 ,  H01L21/687

CPC classification number: G01N27/62

Abstract: Methods and systems for detecting a change in the state of plasma confinement within a capacitively coupled RF driven plasma processing chamber are disclosed. In one or more embodiments, the plasma unconfinement detection methods employ an analog or digital circuit that can actively poll the RF voltage at the powered electrode in the form of an Electrostatic Chuck(ESC) as well as the open loop response of the power supply(PSU) responsible for chucking a wafer to ESC. The circuit provides a means detecting both a change in RF voltage delivered to the ESC as well as a change in the open loop response of the PSU. By simultaneously monitoring these electrical signals, the disclosed algorithm can detect when plasma changes from a confined to an unconfined state.

Abstract translation: 公开了用于检测电容耦合的RF驱动的等离子体处理室内的等离子体约束的状态变化的方法和系统。 在一个或多个实施例中，等离子体非限制检测方法采用模拟或数字电路，其可以以静电卡盘（ESC）的形式主动轮询加电电极处的RF电压以及电源的开环响应（ PSU）负责将晶圆夹持到ESC。 该电路提供了检测传递给ESC的RF电压的变化以及PSU的开环响应的变化的手段。 通过同时监测这些电信号，所公开的算法可以检测等离子体何时从受限状态变为非受约束状态。

公开(公告)号：WO2011011266A3

公开(公告)日：2011-04-21

申请号：PCT/US2010042205

申请日：2010-07-16

Applicant: LAM RES CORP ,  VALCORE JOHN C JR ,  SANTOS ED

Inventor： VALCORE JOHN C JR ,  SANTOS ED

IPC: H05H1/46 ,  H01L21/3065

CPC classification number: H01J37/3299 ,  H01J37/32091 ,  H01J37/32174 ,  H01J37/32935

Abstract: A device for use with an RF generating source, a first electrode, a second electrode and an element. The RF generating source is operable to provide an RF signal to the first electrode and thereby create a potential between the first electrode and the second electrode. The device comprises a connecting portion and a current sink. The connecting portion is operable to electrically connect to one of the first electrode, the second electrode and an element. The current sink is in electrical connection with the connection portion and a path to ground. The current sink comprises a voltage threshold. The current sink is operable to conduct current from the connecting portion to ground when a voltage on the electrically connected one of the first electrode, the second electrode and the element is greater than the voltage threshold.

Abstract translation: 一种用于RF发生源，第一电极，第二电极和元件的装置。 RF产生源可操作以向第一电极提供RF信号，从而在第一电极和第二电极之间产生电位。 该装置包括连接部分和电流槽。 连接部分可操作以电连接到第一电极，第二电极和元件之一。 电流吸收器与连接部分和接地路径电连接。 电流吸收器包括电压阈值。 当第一电极，第二电极和元件上的电连接的电压上的电压大于电压阈值时，电流吸收器可操作以将电流从连接部分传导到地。

公开(公告)号：EP2457420A4

公开(公告)日：2014-11-05

申请号：EP10802684

申请日：2010-07-16

Applicant: LAM RES CORP

Inventor： VALCORE JOHN C JR ,  SANTOS ED

IPC: H05H1/46 ,  H01J37/32 ,  H01L21/3065 ,  H02H9/04

CPC classification number: H01J37/3299 ,  H01J37/32091 ,  H01J37/32174 ,  H01J37/32935

公开(公告)号：SG177271A1

公开(公告)日：2012-02-28

申请号：SG2011093598

申请日：2010-07-16

Applicant: LAM RES CORP

Inventor： VALCORE JOHN C JR ,  SANTOS ED

Abstract: A device for use with an RF generating source, a first electrode, a second electrode and an element. The RF generating source is operable to provide an RF signal to the first electrode and thereby create a potential between the first electrode and the second electrode. The device comprises a connecting portion and a current sink. The connecting portion is operable to electrically connect to one of the first electrode, the second electrode and an element. The current sink is in electrical connection with the connection portion and a path to ground. The current sink comprises a voltage threshold. The current sink is operable to conduct current from the connecting portion to ground when a voltage on the electrically connected one of the first electrode, the second electrode and the element is greater than the voltage threshold.

公开(公告)号：SG11202000376PA

公开(公告)日：2020-02-27

申请号：SG11202000376P

申请日：2018-06-07

Applicant: LAM RES CORP

Inventor： HOWALD ARTHUR M ,  VALCORE JOHN C JR ,  LYNDAKER BRADFORD J

IPC: H01J37/32

Abstract: Systems and methods for tuning a radio frequency (RF) generator are described. One of the methods includes supplying, by a high frequency RF generator, a high frequency RF signal to the IMN. The method includes accessing a plurality of measurement values of a variable measured at an output of the high frequency RF generator to generate a parameter. The variable is measured during a plurality of cycles of operation of a low frequency RF generator. The measurement values are associated with a plurality of values of power supplied by the high frequency RF generator. The method includes determining, for one of the cycles, a value of a frequency of the high frequency RF generator and a value of a factor associated with a shunt circuit of the IMN for which there is an increase in efficiency in power delivered by the high frequency RF generator.