公开(公告)号：MY141072A

公开(公告)日：2010-03-15

申请号：MYPI20063115

申请日：2006-06-29

Applicant: LAM RES CORP

Inventor： WOODS CARLS ,  FARBER JEFFREY J

IPC: B01D19/00

Abstract: A SYSTEM FOR PRODUCING BUBBLE FREE LIQUID INCLUDES A CONTINUOUS LIQUID SOURCE (102') AND A DE-BUBBLING CHAMBER (L04). THE DE-BUBBLING CHAMBER INCLUDES AN OUTLET (L08) AND AN INLET (112). THE INLET COUPLED TO AN OUTLET OF THE CONTINUOUS LIQUID SOURCE BY A SUPPLY PIPE (106). THE DE-BUBBLING CHAMBER ALSO INCLUDES AT LEAST ONE PORT (110A-110C) IN A SIDEWALL (104A) OF THE DE-BUBBLING CHAMBER. THE AT LEAST ONE PORT BEING AT LEAST A LENGTH L FROM THE INLET OF THE DE-BUBBLING CHAMBER. A METHOD FOR PRODUCING BUBBLE FREE LIQUID IS ALSO DESCRIBED.