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    WAFER HOLDING/TRANSFERRING DEVICE AND METHOD THEREOF
    1.
    发明专利
    WAFER HOLDING/TRANSFERRING DEVICE AND METHOD THEREOF 审中-公开

    公开(公告)号：JP2002252266A

    公开(公告)日：2002-09-06

    申请号：JP2001375583

    申请日：2001-12-10

    Applicant: LEICA MICROSYSTEMS

    Inventor： MAINBERGER ROBERT ,  HAHN KURT

    IPC: B25J9/06 ,  B65G49/07 ,  H01L21/677 ,  H01L21/683 ,  H01L21/68

    Abstract: PROBLEM TO BE SOLVED: To provide a wafer transferring apparatus which can rapidly transfer a wafer without generating a long useless time to increase overall throughput, and to provide a transferring method thereof. SOLUTION: This wafer transferring device comprises at least one wafer housing station 2, a robot arm 5 for taking out and/or storing the wafer in the wafer housing station 2, a first intermediate housing part 8 for a wafer 1, a wafer processing station 3, and a holding device 7 which transfers the wafer 1 from the first intermediate housing part 8 to the wafer processing station 3 and transfer back from the wafer processing station 3 to the first intermediate housing part 8. A second intermediate housing part 9 is arranged between the wafer housing station 2 and the wafer processing station 3. The first intermediate housing part 8 is utilized as a housing part for transferring the wafer to the wafer processing station 3, and the second intermediate housing part 9 is utilized as a housing part for transferring back the wafer from the wafer processing station 3 to the foregoing stage.

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