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公开(公告)号：JP2003232989A
公开(公告)日：2003-08-22
申请号：JP2003025554
申请日：2003-02-03
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL , OSTERFELD MARTIN , GRAF UWE
Abstract: PROBLEM TO BE SOLVED: To constitute an automatic focusing module in such a manner that sharpness adjustment to an object to be examined can be surely made without depending upon an edge effect. SOLUTION: The module is provided with at least two light sources and each of the two light sources forms a light beam for focusing. The light sources are respectively provided with optical means for guiding portions of the respective light beams to input coupling means. The input coupling means input and couple the respective light beams to an illumination light beam of the system of the microscopic base and are provided with at least first and second detectors toward the object in such a manner that the light beams from the first and second light sources respectively reflected from the surface of the object are made incident on the first and second detectors through the optical means. COPYRIGHT: (C)2003,JPO
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公开(公告)号：JP2002252266A
公开(公告)日：2002-09-06
申请号：JP2001375583
申请日：2001-12-10
Applicant: LEICA MICROSYSTEMS
Inventor： MAINBERGER ROBERT , HAHN KURT
IPC: B25J9/06 , B65G49/07 , H01L21/677 , H01L21/683 , H01L21/68
Abstract: PROBLEM TO BE SOLVED: To provide a wafer transferring apparatus which can rapidly transfer a wafer without generating a long useless time to increase overall throughput, and to provide a transferring method thereof. SOLUTION: This wafer transferring device comprises at least one wafer housing station 2, a robot arm 5 for taking out and/or storing the wafer in the wafer housing station 2, a first intermediate housing part 8 for a wafer 1, a wafer processing station 3, and a holding device 7 which transfers the wafer 1 from the first intermediate housing part 8 to the wafer processing station 3 and transfer back from the wafer processing station 3 to the first intermediate housing part 8. A second intermediate housing part 9 is arranged between the wafer housing station 2 and the wafer processing station 3. The first intermediate housing part 8 is utilized as a housing part for transferring the wafer to the wafer processing station 3, and the second intermediate housing part 9 is utilized as a housing part for transferring back the wafer from the wafer processing station 3 to the foregoing stage.
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公开(公告)号：DE102012210905B4
公开(公告)日：2014-01-09
申请号：DE102012210905
申请日：2012-06-26
Applicant: LEICA MICROSYSTEMS
Inventor： SIEPER JOCHEN , MAINBERGER ROBERT , RENTZSCH WOLFGANG
Abstract: Die Erfindung betrifft eine Beleuchtungseinrichtung (100) für ein Mikroskop (200) aufweisend eine Lichtquelle (110) sowie wenigstens zwei Stromregeleinrichtungen (120, 130), wobei jede der wenigstens zwei Stromregeleinrichtungen (120, 130) einen Sollwerteingang (121, 131) und eine Messwiderstandsanordnung (R1; R2) aufweist und dazu eingerichtet ist, einen Durchflussstrom (I1, I2) für die Lichtquelle (110) zu liefern und über einen Spannungsabfall (U1, U2) an der Messwiderstandsanordnung (R1; R2) die Stärke des Durchflussstroms (I1, I2) basierend auf einem an dem Sollwerteingang (121, 131) anliegenden Signal (US1, US2) zu regeln.
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公开(公告)号：DE59808273D1
公开(公告)日：2003-06-12
申请号：DE59808273
申请日：1998-01-09
Applicant: LEICA MICROSYSTEMS
Inventor： MAINBERGER ROBERT
Abstract: A method and an apparatus for driving a stepping motor is provided. Digital desired current values are stored in the form of a sine table and are read from the sine table at a constant sampling frequency. The intervals between the read-out table values can be varied equally and unequally. The digital desired current values are converted into discrete analog signals. A sinusoidal signal is reconstructed from the analog signals. A motor current for exciting a phase of the stepping motor is derived from the sinusoidal signal.
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公开(公告)号：DE10204367B4
公开(公告)日：2006-05-11
申请号：DE10204367
申请日：2002-02-02
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL , OSTERFELD MARTIN , GRAF UWE
Abstract: Autofocus module for a microscope system (2) comprises: at least two light sources (20, 21) each of which generates a light beam (22) for focussing; optical deflector or prism (27, 32) for deflection of a part of each beam into an beam that is used to illuminate an object; and at least first and second detectors (35, 45) for detecting light originating from respective light sources reflected from the object. Independent claims are included for: (1) a corresponding microscope system; (2) autofocus method. According to the method the optimal focal position is determined using the measured intensities on the first and second detectors.
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Patent Agency Ranking
公开(公告)号：DE10239548A1
公开(公告)日：2004-03-04
申请号：DE10239548
申请日：2002-08-23
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , GRAF UWE , MAINBERGER ROBERT , SOENKSEN DIRK , KNORZ VOLKER
Abstract: A device and method for inspecting an object ( 2 ) uses a bright field illumination beam path ( 4 ) of a bright field light source ( 5 ), said beam path being formed so that it passes through the projection optics ( 3 ), and a dark field illumination beam path ( 6 ) of a dark field light source ( 7 ), this beam path being formed so that it also passes through the projection optics ( 3 ). The object ( 2 ) can be projected by the projection optics ( 3 ) onto the least one detector ( 8 ), and the object ( 2 ) is simultaneously illuminated by both light sources ( 5, 7 ). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.
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公开(公告)号：DE10061628A1
公开(公告)日：2002-06-27
申请号：DE10061628
申请日：2000-12-11
Applicant: LEICA MICROSYSTEMS
Inventor： MAINBERGER ROBERT , HAHN KURT
IPC: B25J9/06 , B65G49/07 , H01L21/677 , H01L21/683 , B65G49/00
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公开(公告)号：DE102012207217B4
公开(公告)日：2021-03-04
申请号：DE102012207217
申请日：2012-04-30
Applicant: LEICA MICROSYSTEMS
Inventor： RENTZSCH WOLFGANG , SIEPER JOCHEN , MAINBERGER ROBERT
Abstract: Mikroskop (200) mit einer Beleuchtungseinrichtung (100) aufweisend eine Lichtquelle (110) sowie eine Stromregeleinrichtung (120), welche eine Messwiderstandsanordnung (130) aufweist und dazu eingerichtet ist, einen Durchflussstrom (I0) für die Lichtquelle (110) zu liefern und die Stärke des Durchflussstroms (I0) anhand eines Spannungsabfalls (U0) an der Messwiderstandsanordnung (130) zu regeln,dadurch gekennzeichnet,dass die Messwiderstandsanordnung (130) genau zwei Widerstandsbauelemente (R1, R2) und Schaltmittel (S) aufweist, die mit den zwei Widerstandsbauelementen (R1, R2) verbunden sind, wobei die Messwiderstandsanordnung (130) so ausgebildet ist, dass sie in wenigstens zwei unterschiedliche Widerstands-Konfigurationen mit unterschiedlichen elektrischen Widerständen gebracht werden kann,wobei ein erstes Widerstandsbauelement (R1) der zwei Widerstandsbauelemente (R1, R2) eine erste Widerstands-Konfiguration definiert und eine Parallel- oder Reihenschaltung des ersten und eines zweiten Widerstandsbauelements (R2) der zwei Widerstandsbauelemente eine zweite Widerstands-Konfiguration definiert.
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公开(公告)号：DE10157244B4
公开(公告)日：2006-05-04
申请号：DE10157244
申请日：2001-11-22
Applicant: LEICA MICROSYSTEMS
Inventor： MAINBERGER ROBERT
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公开(公告)号：DE50300349D1
公开(公告)日：2005-04-21
申请号：DE50300349
申请日：2003-01-21
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ DR , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL DR , OSTERFELD MARTIN DR , GRAF UWE
Abstract: Autofocus module for a microscope system (2) comprises: at least two light sources (20, 21) each of which generates a light beam (22) for focussing; optical deflector or prism (27, 32) for deflection of a part of each beam into an beam that is used to illuminate an object; and at least first and second detectors (35, 45) for detecting light originating from respective light sources reflected from the object. Independent claims are included for: (1) a corresponding microscope system; (2) autofocus method. According to the method the optimal focal position is determined using the measured intensities on the first and second detectors.
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