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公开(公告)号：JP2001042224A
公开(公告)日：2001-02-16
申请号：JP2000206798
申请日：2000-07-07
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: PROBLEM TO BE SOLVED: To provide an extremely excellently corrected DUV objective lens at least having a numerical aperture being 0.80, having a short focal distance and capable of being used for IR autofocusing. SOLUTION: The DUV focus includes a DUV wavelength range λDUV±Δλ (Δλ=8 nm), and the objective lens has an IR focus concerning IR wavelength λIR>=760 nm at the same focal position as the DUV focus in λDUV. Therefore, the second last element (L12a and L12b) of the objective lens is constituted to be biconcave, and the DUV objective lens is constituted so that the outside radius on an object side may be smaller than that on an image side obviously.
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公开(公告)号：JP2002139673A
公开(公告)日：2002-05-17
申请号：JP2001198939
申请日：2001-06-29
Applicant: LEICA MICROSYSTEMS WETZLER GMB
Inventor： CEMIC FRANZ , DANNER LAMBERT , HOPPEN GERHARD
IPC: G01B11/00 , G01B11/03 , G02B6/00 , G02B6/42 , G02B19/00 , G02B27/00 , G02B27/09 , G03F7/20 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To provide an illuminator which uniformly irradiates an image field extremely wider than heretofore, has little light loss and is extremely small in the light difference within the irradiated image field and a coordinate measuring instrument having this illuminator. SOLUTION: An optical fiber bundle (4) is arranged as an optical waveguide. A uniformizing optical system (6), which uniformizes the nonuniform intensity distribution of the light emitted from the optical fiber bundle (4) in the image field, is arranged between a coupling-out optical system (5) and an illumination optical system (17; 20).
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公开(公告)号：JP2002311332A
公开(公告)日：2002-10-23
申请号：JP2002105086
申请日：2002-04-08
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: PROBLEM TO BE SOLVED: To provide a microscope for examination having an autofocus device and to provide an objective lens having optical characteristics stable for a long time. SOLUTION: A second wavelength is larger than 400 nm and the objective lens (11) has an optical correction. This optical correction removes an axial chromatic aberration on the basis of the first and second wavelengths. The lens is assembled without a cement and a gap is formed between at least the two lenses.
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公开(公告)号：DE50010906D1
公开(公告)日：2005-09-15
申请号：DE50010906
申请日：2000-06-09
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: The microscope objective has lens groups of quartz glass and fluorspar and a deep ultraviolet or DUV focus for a deep ultraviolet or IR wavelength greater than or equal to 235 nm and a short focal length. The DUV focus covers a wavelength range of 8 nm. The objective also has an IR focus for an IR wavelength greater than or equal to 760 nm for the same focal position as the DUV focus. A penultimate element of the objective is concave on both sides and its object-side external radius is considerably smaller than its image-side radius.
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Patent Agency Ranking
公开(公告)号：DE10031719A1
公开(公告)日：2002-01-10
申请号：DE10031719
申请日：2000-06-29
Applicant: LEICA MICROSYSTEMS
Inventor： CHEMIC FRANZ , DANNER LAMBERT , HOPPEN GERHARD
IPC: G01B11/00 , G01B11/03 , G02B6/00 , G02B6/42 , G02B19/00 , G02B27/00 , G02B27/09 , G03F7/20 , H01L21/027 , G02B21/06
Abstract: A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.
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公开(公告)号：DE10117167A1
公开(公告)日：2002-10-17
申请号：DE10117167
申请日：2001-04-06
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: Inspection microscope (1) has a light source (3) that emits light of a wavelength less than 400 nm for illumination of an inspection object (13), a composite objective (11) comprised of a number of optical components, a tubular optical device (21) and an auto-focussing device (25) that emits light of a second wavelength towards the object. The second wavelength is greater than 400 nm and the objective has optical correction that eliminates color-length errors arising from first and second wavelengths. An Independent claim is made for an objective that eliminates color-length errors and is assembled using component lenses without any glue.
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公开(公告)号：DE50114460D1
公开(公告)日：2008-12-18
申请号：DE50114460
申请日：2001-06-20
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ DR , DANNER LAMBERT , HOPPEN GERHARD
IPC: G02B27/09 , G01B11/00 , G01B11/03 , G02B6/00 , G02B6/42 , G02B19/00 , G02B27/00 , G03F7/20 , H01L21/027
Abstract: A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.
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公开(公告)号：DE19931949A1
公开(公告)日：2001-01-11
申请号：DE19931949
申请日：1999-07-09
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: The microscope objective has lens groups of quartz glass and fluorspar and a deep ultraviolet or DUV focus for a deep ultraviolet or IR wavelength greater than or equal to 235 nm and a short focal length. The DUV focus covers a wavelength range of 8 nm. The objective also has an IR focus for an IR wavelength greater than or equal to 760 nm for the same focal position as the DUV focus. A penultimate element of the objective is concave on both sides and its object-side external radius is considerably smaller than its image-side radius.
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公开(公告)号：DE10117167B4
公开(公告)日：2004-06-03
申请号：DE10117167
申请日：2001-04-06
Applicant: LEICA MICROSYSTEMS
Inventor： HOPPEN GERHARD
Abstract: Inspection microscope (1) has a light source (3) that emits light of a wavelength less than 400 nm for illumination of an inspection object (13), a composite objective (11) comprised of a number of optical components, a tubular optical device (21) and an auto-focussing device (25) that emits light of a second wavelength towards the object. The second wavelength is greater than 400 nm and the objective has optical correction that eliminates color-length errors arising from first and second wavelengths. An Independent claim is made for an objective that eliminates color-length errors and is assembled using component lenses without any glue.
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