公开(公告)号：DE50303167D1

公开(公告)日：2006-06-08

申请号：DE50303167

申请日：2003-09-24

Applicant: LEICA MICROSYSTEMS

Inventor： CEMIC FRANZ DR ,  DANNER LAMBERT

IPC: G01B11/02 ,  G02B21/16 ,  G01B11/00 ,  G01B11/24 ,  G02B3/00 ,  G02B19/00 ,  G03F7/20

Abstract: Critical dimension measurement instrument (1) has a light source (2), radiation shaping optics (3) and a condenser (11). Between shaping optics and condenser is micro-lens array (5), with each lens generating a divergent beam bundle that fills the condenser pupil. Following the array is an optical auxiliary element with positive refractive coefficient with its focal plane coinciding with the condenser pupil. A second auxiliary optical element of positive refractive coefficient and a second micro-lens array are then position in the beam path prior to the condenser.

公开(公告)号：DE50114460D1

公开(公告)日：2008-12-18

申请号：DE50114460

申请日：2001-06-20

Applicant: LEICA MICROSYSTEMS

Inventor： CEMIC FRANZ DR ,  DANNER LAMBERT ,  HOPPEN GERHARD

IPC: G02B27/09 ,  G01B11/00 ,  G01B11/03 ,  G02B6/00 ,  G02B6/42 ,  G02B19/00 ,  G02B27/00 ,  G03F7/20 ,  H01L21/027

Abstract: A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.

公开(公告)号：DE50300349D1

公开(公告)日：2005-04-21

申请号：DE50300349

申请日：2003-01-21

Applicant: LEICA MICROSYSTEMS

Inventor： CEMIC FRANZ DR ,  DANNER LAMBERT ,  MAINBERGER ROBERT ,  VEITH MICHAEL DR ,  OSTERFELD MARTIN DR ,  GRAF UWE

IPC: G02B7/28 ,  G02B21/24

Abstract: Autofocus module for a microscope system (2) comprises: at least two light sources (20, 21) each of which generates a light beam (22) for focussing; optical deflector or prism (27, 32) for deflection of a part of each beam into an beam that is used to illuminate an object; and at least first and second detectors (35, 45) for detecting light originating from respective light sources reflected from the object. Independent claims are included for: (1) a corresponding microscope system; (2) autofocus method. According to the method the optimal focal position is determined using the measured intensities on the first and second detectors.