公开(公告)号：WO2015051820A1

公开(公告)日：2015-04-16

申请号：PCT/EP2013/070840

申请日：2013-10-07

Applicant: LEMOPTIX SA

Inventor： LEMAIRE, Martin ,  BARRAS, Thierry ,  ABELÉ, Nicolas

IPC: G02B7/00 ,  G02B26/08

CPC classification number: G02B26/085 ,  G02B7/008

Abstract: According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (Θ); providing the actuating means with a drive signal which has an amplitude which is equal to the determined drive signal amplitude

Abstract translation: 根据本发明，提供了一种控制MEMS器件中的MEMS反射镜的位置的方法，其中MEMS器件包括MEMS反射镜，提供磁场（B）的磁体，可操作地协作的致动装置 具有MEMS反射镜，使得其可以向MEMS反射镜施加力，当MEMS致动装置被提供有驱动信号时，可以将MEMS反射镜围绕至少一个旋转轴线倾斜，其中由致动装置施加到MEMS的大小力 反射镜取决于驱动信号的幅度和安装在MEMS反射镜上的检测线圈，该方法包括以下步骤：检测检测线圈的电阻（R）的变化，以便检测 MEMS镜的温度; 确定将MEMS反射镜保持在预定角度位置（Θ）所需的驱动信号幅度; 向致动装置提供具有等于所确定的驱动信号幅度的幅度的驱动信号