Abstract:
A liquid crystal display device and a fabricating method thereof are provided to prevent a pixel opening failure due to a contact hole formed in a protective film by directly connecting a thin film transistor and a pixel electrode. A liquid crystal display device comprises a substrate(100), a gate line(101) and a data line(102), a thin film transistor, a pixel electrode(103), and a spacer(106). The gate line and a data line are formed on the substrate and are crossed each other. The thin film transistor is formed on a cross area of the gate line and the data line. The pixel electrode is connected to the thin film transistor electrically. A part of the spacer is formed on a surface of a semiconductor layer(109) of the thin film transistor. The spacer is formed for covering a channel region(109b) of the semiconductor layer. The spacer is formed with one among an organic film, an inorganic film, or a laminated film of them.
Abstract:
PROBLEM TO BE SOLVED: To prevent an electrode open defect by reducing fabrication unit costs by simplifying fabrication processes of an array substrate. SOLUTION: Disclosed is an array substrate of an liquid crystal display device including a substrate 210 where a plurality of pixel regions are defined, a plurality of gate lines constituted in one direction at specified parts of the pixel regions, data lines which cross the gate lines via an insulating film, thin film transistors which are disposed at intersections of the gate lines and data lines and each include a gate electrode extended from a gate line, an active layer, a source electrode and a drain electrode, a channel insulating film 242 which is formed on the active layer of a thin film transistor between the source electrode and drain electrode, a pixel electrode 281 which is formed in the pixel region in contact with the drain electrode, a gate pad 277 which is extended from the gate line and formed at one end and comes into contact with a transparent electrode pattern via the gate insulating film, and a data pad 278 which is extended from the data line and formed at one end, and formed on an active layer pattern. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide an array substrate for liquid crystal display device and a fabricating method of the same, capable of improving the process yield by reducing a manufacturing cost and time through further simplification of mask processes. SOLUTION: The array substrate for liquid crystal display device is manufactured by using a mask having half transmitting portions of slit widths different from each other upon the second process. Thereby, on the ashing process of a photosensitive layer, etching ratio on a part where wiring is positioned is equalized to the etching ratio on a part where the wiring is not positioned and, therefore, the advantage of preventing a defect from occurring on the surface of the wiring can be obtained. This invention is also characterized in that the array substrate is manufactured through three mask processes. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To obtain a thin film transistor array substrate which protects a thin film transistor without a protective film and decreases its manufacturing cost. SOLUTION: The thin film transistor array substrate comprises a gate electrode 106 connected to a gate line 102, a source electrode 108 connected to a data line 104, a drain electrode 110 facing the source electrode through a channel, semiconductor layers 114, 116 which form the channel between the source electrode and the drain electrode, a pixel electrode 122 formed in contact with the drain electrode, a channel protective film 120 formed on the channel of the semiconductor layer, a gate pad 150 extended from the gate line and with a semiconductor pattern and a transparent conductive pattern laminated, a data pad 160 connected to the data line and with the transparent conductive pattern laminated, and a gate insulating film 112 formed under the semiconductor layer, the gate line and the gate pad, and the data line and the data pad. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
A thin film transistor (TFT) array substrate protects a thin film transistor 130 without the need for a protective film. A gate electrode 106 is connected to a gate line 102. A source electrode 108 is connected to a data line 104 crossing the gate line 102 to define a pixel area (105, fig 4). A drain electrode 110 is provided opposing the source electrode 108 with a channel therebetween. The channel contains a semiconductor layer 114. A pixel electrode 112 in the pixel area (105) contacts the drain electrode 110 over the entire overlapping area between the pixel electrode 112 and the drain electrode 110. A channel protective film is provided on the channel to protect the semiconductor layer 114. Methods of forming the TFT array substrate are also disclosed.
Abstract:
Disclosed is an array substrate of an LCD, and a method for fabricating it, which simplifies the fabrication process, thereby reducing fabrication costs. The process is simplified because the array substrate (210) does not have a passivation film. The thin film transistors on the array substrate (210) each have an active layer (241) that is protected from contamination by forming a channel insulation layer (242) on the active layer (241) through a dry-etching process. Further, the gate line (221), gate pad (271), and gate electrode (222) may have a two-layer structure having a low-resistance metal layer and a barrier metal layer, or a three-layer structure having a low-resistance metal layer and two barrier metal layers. In addition the direct contact between the drain electrode (263) and the pixel electrode (281) avoids failure.
Abstract:
Dans le substrat de réseau de transistors à couches minces, une électrode de grille (106) est connectée à une ligne de grille (102), une électrode de source (108) est connectée à une ligne de données (104) croisant la ligne de grille (102) pour définir une zone de pixel et une électrode de drain (110) est opposée à l'électrode de source (108) avec un canal entre celles-ci. Une couche semi-conductrice se trouve dans le canal.Une électrode de pixel (122) dans la zone de pixel vient en contact avec l'électrode de drain (110) sensiblement sur la zone de chevauchement entière entre les deux. Un film protecteur de canal (120) est disposé sur la couche semi-conductrice correspondant au canal pour protéger la couche semi-conductrice. Le substrat de réseau de transistors à couches minces protège un transistor à couches minces sans film protecteur et réduit en conséquence son coût de fabrication.Application à un dispositif d'affichage à cristaux liquides (LCD).
Abstract:
A thin film transistor array substrate comprises gate electrode connected to gate line; source electrode connected to data line crossing the gate line to define pixel area; drain electrode opposed to the source electrode with a channel between them; semiconductor layer in the channel; pixel electrode overlapping and contacting the drain electrode; and channel protective film provided on the channel to protect the semiconductor layer. A thin film transistor (130) array substrate comprises: (A) gate electrode (106) connected to gate line (102); (B) source electrode (108) connected to data line (104) crossing the gate line to define pixel area; (C) drain electrode (110) opposed to the source electrode with a channel between them; (D) semiconductor layer (114) in the channel; (E) pixel electrode (112) positioned at the pixel area, substantially all of the pixel electrode overlapping the drain electrode contacting the drain electrode; and (F) channel protective film (120) provided on the semiconductor layer corresponding to the channel to protect the semiconductor layer in the channel. An independent claim is also included for fabricating a thin film transistor array substrate, comprising: (A) forming gate electrode on a substrate; (B) forming gate insulating film on the gate electrode; (C) forming source and drain electrodes and semiconductor layer in a channel between the source and drain electrodes, and forming a channel protective film on the semiconductor layer to protect the semiconductor layer in the channel; (D) forming the drain electrode on the gate insulating film; and (E) forming a pixel electrode such that all of the pixel electrode overlapping the drain electrode contacts the drain electrode.
Abstract:
Disclosed is an array substrate of an LCD, and a method for fabricating it, which simplifies the fabrication process, thereby reducing fabrication costs. The process is simplified because the array substrate does not have a passivation film. The thin film transistors on the array substrate each have an active layer that is protected from contamination by forming a channel insulation layer on the active layer through a dry-etching process. Further, the gate line, gate pad, and gate electrode may have a two-layer structure having a low-resistance metal layer and a barrier metal layer, or a three-layer structure having a low-resistance metal layer and two barrier metal layers.
Abstract:
Disclosed is an array substrate of an LCD, and a method for fabricating it, which simplifies the fabrication process, thereby reducing fabrication costs. The process is simplified because the array substrate does not have a passivation film. The thin film transistors on the array substrate each have an active layer that is protected from contamination by forming a channel insulation layer on the active layer through a dry-etching process. Further, the gate line, gate pad, and gate electrode may have a two-layer structure having a low-resistance metal layer and a barrier metal layer, or a three-layer structure having a low-resistance metal layer and two barrier metal layers.