ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND FABRICATING METHOD OF SAME

    公开(公告)号:JP2006323344A

    公开(公告)日:2006-11-30

    申请号:JP2005363227

    申请日:2005-12-16

    Abstract: PROBLEM TO BE SOLVED: To provide an array substrate for liquid crystal display device and a fabricating method of the same, capable of improving the process yield by reducing a manufacturing cost and time through further simplification of mask processes. SOLUTION: The array substrate for liquid crystal display device is manufactured by using a mask having half transmitting portions of slit widths different from each other upon the second process. Thereby, on the ashing process of a photosensitive layer, etching ratio on a part where wiring is positioned is equalized to the etching ratio on a part where the wiring is not positioned and, therefore, the advantage of preventing a defect from occurring on the surface of the wiring can be obtained. This invention is also characterized in that the array substrate is manufactured through three mask processes. COPYRIGHT: (C)2007,JPO&INPIT

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