公开(公告)号：KR20070105040A

公开(公告)日：2007-10-30

申请号：KR20060036996

申请日：2006-04-25

Applicant: LG PHILIPS LCD CO LTD

Inventor： NAM YEON HEUI ,  KIM JIN WUK

IPC: H01L21/027

CPC classification number: G03F7/085 ,  B82Y10/00 ,  B82Y40/00 ,  G02F2001/133519 ,  G03F7/0002 ,  G03F7/0007 ,  G03F7/0751 ,  H01L21/31 ,  H01L27/12 ,  H01L27/1248 ,  H01L27/283 ,  H01L29/66765 ,  H01L2251/105 ,  B81C1/0046 ,  H01L27/1214

Abstract: A resist composition is provided to stably separate a mold and extend the lifetime of the mold and to improve adhesion of a base layer and a resist pattern in an imprinting lithography process. A resist composition includes UV(ultraviolet) curable resin and an additive, containing an adhesion increasing agent for inducing a chemical combination of the UV curable resin and a coated layer. The adhesion increasing agent can be one of an epoxy-based compound or a urethane-based compound. The additive can include at least one of an initiator and a coupling agent.

Abstract translation: 提供抗蚀剂组合物以稳定地分离模具并延长模具的使用寿命，并提高压印光刻工艺中基底层和抗蚀剂图案的粘合性。 抗蚀剂组合物包括UV（紫外线）固化树脂和添加剂，其含有用于引发UV固化树脂和涂层的化学组合的增粘剂。 粘合增加剂可以是环氧类化合物或氨基甲酸酯类化合物之一。 添加剂可以包括引发剂和偶联剂中的至少一种。

公开(公告)号：JP2007335873A

公开(公告)日：2007-12-27

申请号：JP2007156622

申请日：2007-06-13

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： KIM JIN WUK ,  NAM YEON-HEUI

IPC: H01L21/027 ,  B29C33/40 ,  B29C59/02 ,  H01L21/336 ,  H01L29/786

CPC classification number: B29C35/0888 ,  B29C2035/0827

Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing a soft mold and an apparatus of manufacturing the soft mold, in which the soft mold can be made extremely thin without causing the deformation of the soft mold in manufacturing the soft mold for forming a pattern. SOLUTION: The method of manufacturing the soft mold comprises a stage of preparing a master substrate having at least one pattern, a stage of arranging a resin layer on the master substrate so as to cover at least one pattern, a stage of attaching a substrate for separation to the resin layer in a vacuum environment, a stage of stiffening the resin layer, and a stage of separating the resin layer from the master substrate. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种软质模具的制造方法以及软质模具的制造装置，其中软模具可以制成非常薄而不会在软模的制造中引起软模的变形， 形成图案。 解决方案：制造软模的方法包括制备具有至少一种图案的母基板的阶段，在主基板上布置树脂层以便覆盖至少一种图案的阶段，附着阶段 用于在真空环境中分离到树脂层的基板，树脂层的加强阶段以及将树脂层与母基板分离的阶段。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007001288A

公开(公告)日：2007-01-11

申请号：JP2005368187

申请日：2005-12-21

Applicant: LG PHILIPS LCD CO LTD

Inventor： SAI MOTONARI ,  JO GYOO CHUL ,  KIM JIN WUK ,  LEE SHOKI

IPC: B29C33/40 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To provide a soft mold which can be easily applied to mass production by upgrading the durability of the soft mold and preventing the mold from being deformed, and a method for manufacturing the soft mold. SOLUTION: The method for manufacturing this soft mold comprises the following steps: a step to form a master mold with an optional pattern formed on a substrate, a step to form a first liquid polymer precursor formed on the upper part of the master mold, a step to partially cure the first liquid polymer precursor, a step to closely attach a support film with high UV transmission to the upper part of the partially cured polymer, a step to treat the support film and the partially cured polymer with a coupling agent, a step to form a second liquid polymer precursor on the upper part of the partially cured polymer including the support film, a step to form a mold by completely curing the second liquid polymer precursor and the partially cured polymer, and a step to remove a support film-inserted mold from the master mold and form the soft mold with the inserted support film and a specified shape relief engraved or intaglio engraved on one surface. COPYRIGHT: (C)2007,JPO&INPIT

公开(公告)号：JP2007323059A

公开(公告)日：2007-12-13

申请号：JP2007114264

申请日：2007-04-24

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： KIM JIN WUK ,  NAM YEON-HEUI

IPC: G03F7/085 ,  C08K5/5415 ,  C08L101/00 ,  G02B5/20 ,  G03F7/028 ,  G03F7/38 ,  H01L21/027

CPC classification number: G03F7/085 ,  B82Y10/00 ,  B82Y40/00 ,  G02F2001/133519 ,  G03F7/0002 ,  G03F7/0007 ,  G03F7/0751 ,  H01L21/31 ,  H01L27/12 ,  H01L27/1248 ,  H01L27/283 ,  H01L29/66765 ,  H01L2251/105

Abstract: PROBLEM TO BE SOLVED: To provide a resist composition which prevents occurrence of defects in a resist pattern in an imprint lithography process and can improve the durability of a mold, a method for forming a resist pattern using the same, a method of fabricating an array substrate using the same, and an array substrate fabricated using the same. SOLUTION: The resist composition includes a UV curable resin, an additive and an adhesion promoter inducing a chemical bond between the UV curable resin and a base layer in contact with UV curable resin. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种抗蚀剂组合物，其防止在压印光刻工艺中在抗蚀剂图案中发生缺陷，并且可以提高模具的耐久性，使用其形成抗蚀剂图案的方法， 制造使用其的阵列基板，以及使用该阵列基板制造的阵列基板。 抗蚀剂组合物包括紫外光固化树脂，添加剂和引发UV可固化树脂与与UV固化树脂接触的基底层之间的化学键的粘合促进剂。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007173200A

公开(公告)日：2007-07-05

申请号：JP2006144189

申请日：2006-05-24

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： CHAE GEE SUNG ,  KIM JIN WUK

IPC: H05B33/06 ,  G09F9/30 ,  H01L21/336 ,  H01L27/32 ,  H01L29/423 ,  H01L29/49 ,  H01L29/786 ,  H05B33/10 ,  H05B33/12 ,  H05B33/22 ,  H05B33/26

CPC classification number: H01L27/3253 ,  H01L27/12 ,  H01L27/124 ,  H01L27/1292 ,  H01L27/322 ,  H01L51/5284 ,  H01L2251/5315

Abstract: PROBLEM TO BE SOLVED: To provide an organic electroluminescent display device capable of solving a problem of wire breakage due to a contact failure caused by manufacturing a contact electrode with a metal substance between a luminescent array and a TFT array; and to provide its manufacturing method. SOLUTION: This organic electroluminescent display device is provided with: the luminescent array 130 with a color filter array and an organic luminescent layer formed on a first substrate 101; a thin-film transistor array 140 with thin-film transistors for controlling the luminescent array formed on a second substrate 102; and contact parts 150 including contact electrodes for making the luminescent array 130 electrically contact the thin-film transistor array 140. The contact electrode 150 is made of a conductive polymer substance. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 解决问题的方案：提供一种有机电致发光显示装置，其能够解决由于在发光阵列和TFT阵列之间制造具有金属物质的接触电极而导致的接触故障的问题; 并提供其制造方法。 该有机电致发光显示装置设置有：发光阵列130，其具有滤色器阵列和形成在第一基板101上的有机发光层; 具有用于控制形成在第二基板102上的发光阵列的薄膜晶体管的薄膜晶体管阵列140; 以及包括用于使发光阵列130与薄膜晶体管阵列140电接触的接触电极的接触部分150.接触电极150由导电聚合物物质制成。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007001289A

公开(公告)日：2007-01-11

申请号：JP2005369445

申请日：2005-12-22

Applicant: LG PHILIPS LCD CO LTD

Inventor： JO GYOO CHUL ,  KIM JIN WUK

IPC: B29C33/38 ,  G02B5/20 ,  H01L51/50 ,  H05B33/10

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a soft mold with high process matching characteristics irrespective of the size of a master mold to be used for forming the soft mold. SOLUTION: This method for manufacturing the soft mold comprises the following steps: a step to place the master mold on the upper part of a fixture, a step to form a prepolymer layer inside the fixture, a step to attach a base material for back plane to the surface of the prepolymer layer, a step to selectively form a polymer layer by selectively curing the prepolymer layer, a step to remove the polymer layer and the prepolymer layer from the fixture and the master mold, and a step to remove the uncured prepolymer layer. The prepolymer layer is thermally cured or UV-cured, and the thermal curing process is performed inside a microwave oven, and the UV-curing process is performed using a mask defining a transmission region and a light shielding region. COPYRIGHT: (C)2007,JPO&INPIT

公开(公告)号：JP2008015462A

公开(公告)日：2008-01-24

申请号：JP2006346785

申请日：2006-12-22

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： KIM JIN WUK ,  NAM YEON

IPC: G09F9/30 ,  G09F9/00

CPC classification number: G03F7/0017 ,  B29C33/3857 ,  B29C33/40 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

Abstract: PROBLEM TO BE SOLVED: To provide a mold fabricating method having a required surface characteristic because surface energy can be easily changed.
SOLUTION: The mold fabricating method includes: a step for forming a photo-polymerizable resin layer 25 between a master substrate 21 on which a first pattern 23 is formed and a transparent mold substrate 27; a step for solidifying the resin layer 25 by exposing the resin layer 25 to ultraviolet light through the transparent mold substrate 27; and a step for forming a mold 29 having a recess second pattern to which the first pattern 23 is transferred by separating the solidified resin layer 25 being engaged with the mold substrate 27 from the master substrate 21.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供具有所需表面特性的模具制造方法，因为能够容易地改变表面能。 解决方案：模具制造方法包括：在其上形成有第一图案23的母版基板21和透明模制基板27之间形成可光聚合树脂层25的步骤; 使树脂层25通过透明模制基板27暴露于紫外线而使树脂层25固化的工序; 以及用于形成具有凹部第二图案的模具29的步骤，通过将与模制基板27接合的固化树脂层25与主基板21分离，第一图案23被转印到模具29上。（C）2008 ，JPO＆INPIT

公开(公告)号：JP2007183538A

公开(公告)日：2007-07-19

申请号：JP2006161357

申请日：2006-06-09

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： CHAE GEE SUNG ,  JO GYOO CHUL ,  KIM JIN WUK ,  LEE CHANG HEE

IPC: G02F1/1335 ,  G02B5/20

CPC classification number: B29C59/026 ,  B29C43/021 ,  B29L2011/0016 ,  G02F1/13394

Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a flat panel display device wherein manufacturing steps can be simplified, and to provide a method for fabricating the same. SOLUTION: The apparatus for manufacturing the flat panel display device includes a device that applies an organic material on a substrate, a soft mold having a base surface, a groove part recessed in relation to the base surface, and a protruding part, protruding from the base surface and a device that forms a multi-stepped profile pattern in the organic material by contact with the soft mold. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 解决的问题：提供一种用于制造平板显示装置的装置，其中可以简化制造步骤，并提供其制造方法。 解决方案：用于制造平板显示装置的装置包括将有机材料施加在基板上的装置，具有基面的软模，相对于基面凹陷的凹槽部分和突出部分， 从基部表面突出并且通过与软模接触而在有机材料中形成多阶型轮廓图案的装置。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006139249A

公开(公告)日：2006-06-01

申请号：JP2005186989

申请日：2005-06-27

Applicant: Lg Philips Lcd Co Ltd ,  エルジー フィリップス エルシーディー カンパニー リミテッド

Inventor： KIM JIN WUK

IPC: G03F7/20 ,  G02F1/1368 ,  H01L21/027 ,  H01L51/50 ,  H05B33/10

CPC classification number: H01L27/1214 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L27/1288 ,  Y10S977/887

Abstract: PROBLEM TO BE SOLVED: To simplify a fabricating process by performing a patterning process without using a photolithography process, and to form a thin film pattern at a home position by improving the accuracy of alignment. SOLUTION: A fabricating method of a flat panel display includes steps of: spreading an etch-resist, whose polarity is changed by the irradiation with a first light, on a thin film 132a formed on a substrate 131; providing a soft mold 134 having a projected surface 134b and a groove 134a at a face facing to the etch-resist, which soft mold is subjected to surface treatment to be the same polarity as the etch-resist; performing a first alignment of the soft mold 134 and the substrate 131, situated at a prescribed interval; after arranging the soft mold 134 on the etch-resist, performing a second alignment of the soft mold 134 and the substrate 131; changing the polarity of the etch-resist by the irradiation with the first light so that the etch-resist moves into the groove 134a of the soft mold 134; forming an etch-resist pattern on the thin film 132a by irradiating the etch-resist moved in the groove 134a of the soft mold 134 with a second light; separating the soft mold 134 from the formed etch-resist pattern; and forming a thin film pattern by etching the thin film 132a. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了简化通过进行图案化处理而不使用光刻工艺的制造工艺，并且通过提高取向精度在原始位置形成薄膜图案。 解决方案：平板显示器的制造方法包括以下步骤：将形成在基板131上的薄膜132a上的通过第一光照射改变其极性的蚀刻剂铺展; 提供一个柔软的模具134，该模具在面向抗蚀剂的表面具有一个突出表面134b和一个凹槽134a，该软质模具经受表面处理以与抗蚀剂相同的极性; 以规定的间隔进行软模具134和基板131的第一对准; 在将软模具134布置在抗蚀剂上之后，执行软模具134和基板131的第二对准; 通过用第一光照射改变蚀刻剂的极性，使得抗蚀剂移动到软模具134的凹槽134a中; 通过用第二光照射在软模具134的槽134a中移动的蚀刻剂，在薄膜132a上形成蚀刻抗蚀剂图案; 将软模具134与形成的抗蚀剂图案分离; 以及通过蚀刻薄膜132a来形成薄膜图案。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：GB2436009B

公开(公告)日：2008-11-12

申请号：GB0702039

申请日：2005-06-27

Applicant: LG PHILIPS LCD CO LTD ,  LG DISPLAY CO LTD

Inventor： CHAE GEE SUNG ,  JO GYOO CHUL ,  KIM JIN WUK ,  HWANG YONG SUP ,  LEE CHANG HEE

IPC: G02F1/1335

Abstract: A method comprises the steps of forming a black matrix 102 followed by red, green, blue color filters, 102R,G, B, on a substrate 101, coating a transparent resin 182 over the substrate, aligning a soft mold 184 having a groove 186a to the transparent resin layer and simultaneously forming at least a spacer (124, Fig12D) an overcoat layer (122, Fig12D). Preferably a while colour filter (104W, Fig12D) is formed during the moulding step and the groove in the mold corresponds to the spacer. The soft mould may be made from polydimethylsiloxane PDMS, polyurethane or a cross-linked novolac resin. The method preferably includes pressing the soft mould into the resin and soft curing the resin.