公开(公告)号：JPH09199732A

公开(公告)日：1997-07-31

申请号：JP350597

申请日：1997-01-13

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BAUMBACH JOERG ,  KATZ HOWARD EDAN ,  DODABALAPUR ANANTH

IPC: H01L27/08 ,  H01L21/8238 ,  H01L25/07 ,  H01L27/092 ,  H01L27/12 ,  H01L27/28 ,  H01L29/786 ,  H01L35/24 ,  H01L51/00 ,  H01L51/05 ,  H01L51/30

Abstract: PROBLEM TO BE SOLVED: To obtain excellent reliability in the air and appropriately high carrier mobility by using an inorganic thin film transistor as an n-channel transistor and an organic thin film transistor as a p-channel transistor. SOLUTION: The product consists of at least first and second transistors. The two transistors operate by being connected to each other. In a complementary inverter circuit 10, for example, the first transistor is an n-channel transistor 11 and the second transistor is a p-channel transistor 12. The n-channel transistor 11 is an inorganic thin film transistor and the p-channel transistor 12 is an organic thin film transistor. It is preferable that the active layer of the p-channel (organic) TFT is α-6T and that of the n-channel (inorganic) TFT is amorphous silicon (a-Si).