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公开(公告)号：JP2001313535A
公开(公告)日：2001-11-09
申请号：JP2001032114
申请日：2001-02-08
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BOWER JOHN ERIC , PASTALAN JOHN Z , RITTENHOUSE GEORGE E
Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric film used for a resonator device. SOLUTION: In the method of this invention, a texture of a piezoelectric film 120 is directly affected by the surface condition of an electrode layer 135 thereunder and the surface condition of the electrode layer 135 is affected by the surface condition of an oxide layer or plug stack 125 under the electrode layer 135. Thus, the method of this invention is for manufacturing a device including the piezoelectric film and is characterized in that the method includes a step where the surface roughness and the deposition of the electrode are controlled.
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公开(公告)号：DE60143682D1
公开(公告)日：2011-02-03
申请号：DE60143682
申请日：2001-01-29
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BOWER JOHN ERIC , PASTALAN JOHN Z , RITTENHOUSE GEORGE E
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