公开(公告)号：JP2002141633A

公开(公告)日：2002-05-17

申请号：JP2000324945

申请日：2000-10-25

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BROWN WALTER L ,  JIN SUNGHO ,  ZHU WEI

IPC: B82B1/00 ,  B82B3/00 ,  C01B31/02 ,  C23C16/26 ,  H01L23/52 ,  H05K1/14 ,  H05K3/36

Abstract: PROBLEM TO BE SOLVED: To provide an equi-length nanowire and a circuit device vertically interconnected by the nanowire. SOLUTION: This vertically interconnected circuit device is provided. The circuit device has at least two circuit layers, and a plurality of equi-length nanowires arranged between the circuit layers. The nanowires comprise composites having a heterojunction present along the length thereof to provide for a variety of device applications. This method for making the circuit device includes a step for growing the plurality of nanowires on a removable substrate (a), a step for equalizing the length of the nanowires and for making the length of each of the plurality of nanowires nearly equal (b), a step for transferring and joining exposed ends of the plurality of nanowires to a first circuit layer (c), and a step for removing the substrate (d). The nanowire joined to the first circuit layer is further joined to a second one, thus forming the vertically interconnected circuit device.