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    XYZ STAGE MOVABLE IN THREE DIMENSIONAL DIRECTION
    1.
    发明专利
    XYZ STAGE MOVABLE IN THREE DIMENSIONAL DIRECTION 失效

    公开(公告)号：JPH11166938A

    公开(公告)日：1999-06-22

    申请号：JP26705598

    申请日：1998-09-21

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  GAMMEL PETER L

    IPC: G12B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/18 ,  G02B21/26 ,  H02N1/00

    Abstract: PROBLEM TO BE SOLVED: To enable movement in three dimensional directions on an accurate submicron scale by providing a z-axis direction driving means out of the plane formed by x-axis and y-axis direction driving means. SOLUTION: In an xy stage 4, x-axis and y-axis direction driving means 20 and 40 moves a sample stage 12 in an x-y plane via links 14 and 16. In an xyz stage 2, a z-axis direction driving means 48 added to the xy stage 4 suspends a flat electrode 50 via a supporting means 54 and accesses the sample stage 12 vertically from the through opening 52 of the flat electrode 50. When a voltage is placed to the flat electrode 50 via a wire 76 to an electrode 70, an electrostatic force is generated between the sample stage 12 and the flat electrode 50, and the sample stage 12 is moved from the x-y plane in the direction of the flat electrode 50 as if springing out. Its location is detected by an accurate capacitance bridge to control the movement in a z-direction approximately within 20 nm. This enables movement in three dimensional directions in a submicron scale.

    ARTICLE HAVING LIGHT-ACTUATED MICROSCOPIC MACHINE PHOTON SWITCH
    2.
    发明专利
    ARTICLE HAVING LIGHT-ACTUATED MICROSCOPIC MACHINE PHOTON SWITCH 失效

    公开(公告)号：JPH11154447A

    公开(公告)日：1999-06-08

    申请号：JP25587698

    申请日：1998-09-10

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  GAMMEL PETER L ,  GILES C RANDY

    IPC: G02B26/08 ,  G02B6/12 ,  G02B6/122 ,  G02B6/35 ,  H01H35/00 ,  H04B10/02

    Abstract: PROBLEM TO BE SOLVED: To prevent a light signal from entering a destination fiber by going over a gap by mechanically connecting an actuator and a reflector, and changing a light-actuated photon switch state by moving the reflector by actuation of the actuator. SOLUTION: When a photogenerator 104 is irradiated by a light beam 112 through an optical fiber 110, the generator 104 generates voltage, and the voltage is transmitted to an actuator 126 of a microscopic electronic machine system MEMS structure 124 through electric conductors 106 and 108. When the voltage is transmitted, a reflector 130 capable of changing a light signal characteristic by reflection, diffraction, absorption and the others, moves to a passage of a signal 134 from a signal source fiber 132a by a connecting mechanism 128. Therefore, the light signal 134 can be prevented from reaching a destination fiber 132E by going over a gap 136. Here, the dimension of the gap 136 can be comparatively reduced to about 20 μm without a lens, and becomes fairly large with a lens.

    OPTICAL DEVICE
    3.
    发明专利
    OPTICAL DEVICE 失效

    公开(公告)号：JP2000010028A

    公开(公告)日：2000-01-14

    申请号：JP15369699

    申请日：1999-06-01

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR A ,  BARBER BRADLEY P ,  BISHOP DAVID J ,  GAMMEL PETER L ,  GILES RANDY C

    IPC: G02B26/02 ,  G02B6/12 ,  G02B6/35 ,  G02B6/36 ,  G02B6/42

    Abstract: PROBLEM TO BE SOLVED: To embody a microoptelectronic mechanical system(MOEMS) device capable of providing a silicon optical bench(SiOB) device with a switching function to avert many of the performance threhoslds of an interferometer switch. SOLUTION: The MOEMS device has a microoptelectronic mechanical system(MEMS) device 502, the optical bench(OB) device including a substrate 500 and at least one optical device. The OB device substrate is, for example, silicon or glass. The MEMS device 502 is capable of providing the OB device with the mechanical, electromechanical or electrical function, such as switching. The MEMS device 502 has an actuator mechanically coupled to an optical interrupter 514. This optical interrupter 514 prohibits the propagation of at least part of an incident optical signal 522.

    ARTICLE INCLUDING DEFORMABLE MIRROR
    4.
    发明专利
    ARTICLE INCLUDING DEFORMABLE MIRROR 失效

    公开(公告)号：JP2001091866A

    公开(公告)日：2001-04-06

    申请号：JP2000130593

    申请日：2000-04-28

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： VLADIMIR ANATOLIEVICH ,  BARBER BRADLEY PAUL ,  BISHOP DAVID J ,  GAMMEL PETER L ,  GILES C RANDY

    IPC: G02B5/10 ,  G02B6/35 ,  G02B7/198 ,  G02B26/08

    Abstract: PROBLEM TO BE SOLVED: To provide adaptive optics in the type of a micromachined mirror to eliminate the optical/mechanical independence of a uniform reflection layer and to eliminate the many actuators of the conventional mirror arrays. SOLUTION: This article for directing a light signal between optical waveguides is disclosed. The article includes plural mirror elements which are mechanically and electrically interconnected and form reflection surfaces. The reflection surfaces can be deformed by impression of voltage. The light signal sent from the source waveguide can be directed to the different destination waveguides when the reflection surfaces are deformed. The plural mirror elements are actuated by the single actuator.

    OPTICAL SWITCH
    5.
    发明专利
    OPTICAL SWITCH 失效

    公开(公告)号：JPH1144852A

    公开(公告)日：1999-02-16

    申请号：JP13348598

    申请日：1998-05-15

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  GAMMEL PETER L

    IPC: G02B26/08 ,  G02B6/35

    Abstract: PROBLEM TO BE SOLVED: To obtain a switch which is low in cost and is high in a switching rate by providing this switch with a link mechanism capable of moving an optical device between a first position deviating from an optical path and a second position within the optical path by the reciprocating motion of a moving plate. SOLUTION: The optical switch 2a has a hinged plate actuator 4a, the optical device 8 and the link mechanism 6a. The link mechanism 6a mechanically links or interconnects the hinged plate actuator 4a to the optical device 8. The link mechanism 6a exists along an axis 1-1. This axis 1-1 passes by a gap 10 between waveguides 12 and 14. The link mechanism 6a and the optical device 8 exist relative to the waveguides 12 and 14 in such a manner that the both are movable between the first position where the optical device 8 exists in the path of the light signal moving between the fibers and the second position where the device exists off the path.

    DEVICE HAVING MASK WITH HINGE AND FORMATION OF MICROELECTROMECHANICAL SYSTEM DEVICE
    6.
    发明专利
    DEVICE HAVING MASK WITH HINGE AND FORMATION OF MICROELECTROMECHANICAL SYSTEM DEVICE 失效

    公开(公告)号：JPH1138591A

    公开(公告)日：1999-02-12

    申请号：JP13289398

    申请日：1998-05-15

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  GAMMEL PETER L

    IPC: G03F1/00

    Abstract: PROBLEM TO BE SOLVED: To provide a method for forming an MEMS(microelectromechanical system) device capable of facilitating alignment without restricting the composition of film or the constitution of the MEMS device. SOLUTION: The masks with hinge 60 and 70 and the MEMS device 80 are partially formed on a substrate 58 at the same time. Apertures 62 and 72 formed on the masks 60 and 70 regulate a pattern, which is transferred in the form of a pattern layer. After releasing the device 80, the mask 60 is turned by about 180 deg. and arranged on the device 80 so as to be used as a shadow mask of micro size, whereby the optional pattern layer is formed on the device 80. By forming the mask with a hinge by initial-stage lithography, the mask is accurately aligned with the MEMS device. Continuously, the mask 70 is similarly used to form the pattern layer.

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