公开(公告)号：JP2001229865A

公开(公告)日：2001-08-24

申请号：JP2000309801

申请日：2000-10-10

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KRUIT PETER ,  MOONEN DANIEL ,  KATSAP VICTOR ,  WASKIEWICZ WARREN K

IPC: G21K5/04 ,  G03F7/20 ,  H01J37/065 ,  H01J37/12 ,  H01J37/305 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a method and apparatus for controlling electron emittance. SOLUTION: In the method and apparatus, a lens row is disposed in a drift space for components of a charged particle radiating system. The components of the radiating system are an electron gun and a linear tube or drift tube mounted on the electron gun. The lens row is a mesh grid or a combination of the mesh grid and continuous foil. The lens row forms a plurality of micro- lenses for imitating an optical flying-eye lens. The lens row separates an actual incident electron beam into a plurality of sub-beams. As a result, beam emittance outputted is different from the incident emittance, but the total current for the beam remains unchanged.