公开(公告)号：JP2001102377A

公开(公告)日：2001-04-13

申请号：JP2000248125

申请日：2000-08-18

Applicant: LUCENT TECHNOLOGIES INC

Inventor： GERARD W GIBSON ,  STEVEN ALAN LITTLE ,  MARY DORUMONDO ROBBY ,  DANIEL JOSEPH BITTOKABAJI ,  WOLF THOMAS MICHAEL

IPC: H01L21/768 ,  H01L21/314 ,  H01L21/316 ,  H01L23/522 ,  H01L23/532 ,  H01L27/00

Abstract: PROBLEM TO BE SOLVED: To provide a method for forming a dielectric layer of low permittivity in an integrated circuit. SOLUTION: A step, where a dielectric layer of multi-layer structure is formed on a substrate, is provided, with the dielectric layer of multilayer structure comprising a structure-body layer and a dielectric layer of low pesmittivity.

公开(公告)号：JP2001110901A

公开(公告)日：2001-04-20

申请号：JP2000248124

申请日：2000-08-18

Applicant: LUCENT TECHNOLOGIES INC

Inventor： GERARD W GIBSON ,  STEVEN ALAN LITTLE ,  MARY DORUMONDO ROBBY ,  DANIEL JOSEPH BITTOKABAJI ,  WOLF THOMAS MICHAEL

IPC: H01L27/00 ,  H01L21/316 ,  H01L21/768 ,  H01L21/822 ,  H01L23/522 ,  H01L23/532 ,  H01L27/04

Abstract: PROBLEM TO BE SOLVED: To provide a method of providing a dielectric layer of low dielectric constant on an integrated circuit. SOLUTION: This method comprises a step where a dielectric layer of multilayered structure is formed on a substrate, and the dielectric layer of multilayered structure is composed of a structure layer and a dielectric layer of low dielectric constant.