公开(公告)号：JPH10284694A

公开(公告)日：1998-10-23

申请号：JP8196798

申请日：1998-03-27

Applicant: LUCENT TECHNOLOGIES INC

Inventor： MAURIIN E RAU ,  LIN JENSHAN ,  TAI KING L

IPC: H01F17/00 ,  H01L21/822 ,  H01L23/14 ,  H01L27/04 ,  H01L27/12

Abstract: PROBLEM TO BE SOLVED: To obtain a low cost substrate which has an advantage of single crystal Si and a resistivity higher than the single crystal Si and which can be used as a silicon substrate supporting an electronic circuit operating at a frequency higher than a radio frequency by a method, wherein a polycrystalline silicon substrate which has a resistivity higher than a specific value is employed. SOLUTION: A low cost and low loss substrate 71 made of a high resistivity polycrystalline Si which is intermediate product in the manufacture of single crystal Si necessary for the manufacture of an electronic component and has a resistivity of higher than 200 Ω.cm is provided. A product having transmission lines and/or inductive circuit elements is formed on the substrate 71. Thus, by employing the polycrystalline silicon substrate which has a low cost and a high conductivity, an inductor which has not only an economical advantage but also technical advantage, i.e., the high Q-value and the low loss of its transmission line, over an inductor using a conventional single crystal Si substrate can be obtained.