公开(公告)号：JPH09197678A

公开(公告)日：1997-07-31

申请号：JP428497

申请日：1997-01-14

Applicant: LUCENT TECHNOLOGIES INC

Inventor： FERRY ALAN E ,  LAU MAUREEN YEE ,  BYUNG JOON HAN ,  SCRUTON ROBERT T SR ,  TAI KING LIEN

IPC: G03F7/20 ,  H05K3/00 ,  H05K3/06

Abstract: PROBLEM TO BE SOLVED: To form a metal or insulating precise pattern on a print circuit board. SOLUTION: A reversible projecting lens 13 serves as a size decreasing lens for a conventional lithography stepper but as a magnifying lens, having a large focal distance sufficient for absorbing a flat displacement of an PC board. This reversible lens decreases the size of an image required by a mask 15, and accordingly, a plurality of mask levers can be combined on a single glass pane. Accordingly, the cost for assembling the masks can be lowered, and accordingly, a small glass mask can be used, having a size which is precise and stable in dimensions in comparison with a conventional miler mask. The projecting lens is reversed on a sophisticated old type stepper, and thereby it is possible to form a metal pattern with a high degree of precise dimensions which have not ever been experienced.