公开(公告)号：DE69941168D1

公开(公告)日：2009-09-10

申请号：DE69941168

申请日：1999-01-19

Applicant: LUCENT TECHNOLOGIES INC

Inventor： TAI KING LIEN ,  ZHAO JINGSONG

IPC: H01L21/822 ,  H03H3/00 ,  H01L23/12 ,  H01L23/64 ,  H01L27/04 ,  H01P7/00 ,  H01P7/08 ,  H03H5/02 ,  H03H7/01 ,  H03H9/05 ,  H05K1/16

Abstract: An MCM including a resonator made using conventional MCM fabrication techniques. The MCM's resonator is constructed with overlapping first and second spiral-shaped regions of metallic material separated by a layer of dielectric material. A via disposed in the layer of dielectric material, couples the spiral-shaped regions of metallic material together, thereby utilizing self winding and internal capacitance to gain resonance at frequencies between 500 MHz to 3GHz. The internal capacitance is increased by controlling the overlap between the first and second spiral-shaped regions of metallic materials. On a high-resistivity substrate, the monolithic resonator achieves a Q of at least 19 at approximately 900MHz and at least 24 at approximately 2GHz.