公开(公告)号：EP1223453A3

公开(公告)日：2004-01-21

申请号：EP01310931.9

申请日：2001-12-28

Applicant: Agere Systems Guardian Corporation ,  Lucent Technologies Inc.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bolle, Christian A. ,  Pardo, Flavio

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  Y10S359/904

Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element (115) that is rotatably connected to a support structure (125) via torsional members (116,117,121,122). The torsional members (116,117,121,122) provide a restoring force to keep the actuated element (115) planar to the surface of an underlying substrate (110). The surface of the substrate (110) has electrodes (130-133,130'-133') formed thereon. The electrodes (130-133,130'-133') are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes (eg. 132',133'), an electrostatic force is generated which causes the actuated element (115) to rotate out of plane. The electrodes (130-133,130'-133') have three components (eg. 132',131,133'). At least a portion of two of the components (eg. 132',131) is within the tilting area of the actuated element (115). The third (eg. 133') is outside the tilting area of the actuated element (115). The tilting area is defined as the surface area of the actuated element (115) as projected onto the underlying substrate (110).

公开(公告)号：EP1093004A3

公开(公告)日：2003-04-02

申请号：EP00308118.9

申请日：2000-09-18

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John ,  Bolle, Christian A. ,  Gates II, John Vanatta ,  Giles, Randy Clinton ,  Scotti, Ronald Edward

IPC: G02B26/08 ,  B81B3/00 ,  H01L25/065

CPC classification number: G02B26/0816 ,  G02B6/3512 ,  G02B6/3556 ,  H01L2224/48091 ,  H01L2224/48227 ,  Y10S359/904 ,  H01L2924/00014

Abstract: An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.

公开(公告)号：EP1223453A2

公开(公告)日：2002-07-17

申请号：EP01310931.9

申请日：2001-12-28

Applicant: Agere Systems Guardian Corporation ,  Lucent Technologies Inc.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bolle, Christian A. ,  Pardo, Flavio

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  Y10S359/904

Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element (115) that is rotatably connected to a support structure (125) via torsional members (116,117,121,122). The torsional members (116,117,121,122) provide a restoring force to keep the actuated element (115) planar to the surface of an underlying substrate (110). The surface of the substrate (110) has electrodes (130-133,130'-133') formed thereon. The electrodes (130-133,130'-133') are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes (eg. 132',133'), an electrostatic force is generated which causes the actuated element (115) to rotate out of plane. The electrodes (130-133,130'-133') have three components (eg. 132',131,133'). At least a portion of two of the components (eg. 132',131) is within the tilting area of the actuated element (115). The third (eg. 133') is outside the tilting area of the actuated element (115). The tilting area is defined as the surface area of the actuated element (115) as projected onto the underlying substrate (110).

Abstract translation: 公开了一种微机电系统（MEMS）致动器装置。 MEMS致动器装置具有经由扭转构件（116,117,121,122）可旋转地连接到支撑结构（125）的致动元件（115）。 扭转构件（116,117,121,122）提供恢复力以将致动元件（115）平坦地保持到下面的基底（110）的表面。 基板（110）的表面具有在其上形成的电极（130-133,130'-133'）。 电极（130-133,130'-133'）适于接收电位。 当电势施加到某些电极（例如132'，133'）时，产生静电力，使得致动元件（115）旋转离开平面。 电极（130-133,130'-133'）具有三个部件（例如132'，131,133'）。 两个部件（例如132'，131）中的至少一部分在致动元件（115）的倾斜区域内。 第三（例如133'）在致动元件（115）的倾斜区域之外。 倾斜区域被定义为被投影到下面的基底（110）上的致动元件（115）的表面积。

公开(公告)号：EP1102104A2

公开(公告)日：2001-05-23

申请号：EP00309833.2

申请日：2000-11-06

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladmir Anatolyevich ,  Bishop, David John ,  Bolle, Christian A. ,  Giles, Randy Clinton ,  Pardo, Flavio

IPC: G02B26/02 ,  G02B26/08

CPC classification number: G02B6/3514 ,  G02B6/3548 ,  G02B6/355

Abstract: An optical switch for use in optical applications utilizes a MEMS reflective shutter (28) and at least one reflecting device (27) to provide optical switching between an input (22) and two or more outputs (24,26) while reducing the amount of physical space required to position the respective input and outputs, and thereby minimize the size of the optical switch.

Abstract translation: 用于光学应用的光学开关利用MEMS反射快门（28）和至少一个反射装置（27），以在输入（22）和两个或更多个输出（24,26）之间提供光学切换，同时减少 定位相应的输入和输出所需的物理空间，从而使光开关的尺寸最小化。

公开(公告)号：EP1584889B1

公开(公告)日：2007-02-28

申请号：EP05251769.5

申请日：2005-03-23

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Bolle, Christian A.

IPC: F42C19/06

CPC classification number: F42C19/06

公开(公告)号：EP1223453B1

公开(公告)日：2006-11-15

申请号：EP01310931.9

申请日：2001-12-28

Applicant: Agere Systems Guardian Corporation ,  LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bolle, Christian A. ,  Pardo, Flavio

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  Y10S359/904

公开(公告)号：EP1637831A1

公开(公告)日：2006-03-22

申请号：EP05255357.5

申请日：2005-09-01

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Bolle, Christian A.

IPC: F42C19/06

CPC classification number: F42C19/06

Abstract: A highly reliable fuse can be achieved by employing a micro mechanical device (103) that operates to entirely disconnect a relatively low impedance circuit coupled to a pair of electrical connection points (109), e.g., circuit points or terminals. The removal of the electrical circuit is performed as a result of the movement of the micro mechanical device (103). More specifically, the electrical connection may be removed by having at least one low impedance electrical bridge (105) that is part of the circuit break when the micro mechanical device (103) is subjected to prescribed trigger activation forces. When there is more than one relatively low impedance circuit coupling the pair of electrical connection points (109), all of the relatively low impedance circuits must be disrupted, e.g., by breaking at least one low impedance electrical bridge (105) that is part of each circuit.

Abstract translation: 可以通过采用微机械装置（103）来实现高度可靠的熔断器，微机械装置（103）完全断开耦合到一对电连接点（109）的相对低阻抗的电路，例如电路点或端子。 作为微机械装置（103）的移动的结果，执行电路的移除。 更具体地，可以通过在微机械装置（103）经受规定的触发激活力时具有作为断路的一部分的至少一个低阻抗电桥（105）来去除电连接。 当耦合该对电连接点（109）的多于一个的相对较低的阻抗电路时，所有相对低阻抗的电路必须被破坏，例如通过断开至少一个低阻抗电桥（105） 每个电路。

公开(公告)号：EP1584889A1

公开(公告)日：2005-10-12

申请号：EP05251769.5

申请日：2005-03-23

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Bolle, Christian A.

IPC: F42C19/06

CPC classification number: F42C19/06

Abstract: A highly reliable fuse for explosives and armaments is achieved by employing a micro mechanical device that operates to disrupt a relatively low impedance bypass circuit coupled in parallel with a relatively high impedance trigger mechanism (101). The removal of the electrical bypassing is performed as a result of the movement of the micro mechanical device to enable detonation under prescribed conditions. The electrical bypassing is removed by having at least one low impedance electrical bridge (105) that is part of the bypass circuit break when the micro mechanical device (103,105) is subjected to prescribed trigger activation forces, which are typically large forces, such as are generated during launch or impact. The micro mechanical device may be a micro-electrical mechanical system (MEMS) device and the bridge is at least one spring that is part of the MEMS device and also part of the bypass circuit.

Abstract translation: 用于爆炸物和军备的高度可靠的熔断器通过采用微机械装置来实现，所述微机械装置用于破坏与相对高阻抗的触发机构（101）并联耦合的相对低阻抗的旁路电路。 由于微机械装置的移动使得能够在规定条件下引爆，所以进行电旁路的去除。 当微机械装置（103,105）经受规定的触发激活力（通常是大的力）时，通过具有作为旁路电路的一部分的至少一个低阻抗电桥（105）来去除电旁路，例如 在发射或撞击时产生。 微机械装置可以是微电机械系统（MEMS）装置，并且桥是至少一个弹簧，其是MEMS装置的一部分，也是旁路电路的一部分。

公开(公告)号：EP1093004A2

公开(公告)日：2001-04-18

申请号：EP00308118.9

申请日：2000-09-18

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John ,  Bolle, Christian A. ,  Gates II, John Vanatta ,  Giles, Randy Clinton ,  Scotti, Ronald Edward

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0816 ,  G02B6/3512 ,  G02B6/3556 ,  H01L2224/48091 ,  H01L2224/48227 ,  Y10S359/904 ,  H01L2924/00014

Abstract: An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.

Abstract translation: 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片，以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线，至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。