Abstract:
A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an "active" arm that is movably mounted on a substrate. The "active" arm has (i) a thermal expansion layer and (H) -a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the "active" arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the "active" arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.
Abstract:
A high inductance, out-of-plane inductor is achieved by forming on a flat flexible base conductive elements that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.
Abstract:
According to one embodiment, a reinforcing strut (240) of the invention is a polyhedron attached to a plate (212) and having at least two slanted facets, with each of the slanted facets oriented with respect to the plane of the plate at an angle different from about 90 degrees, Two slanted facets intersect to form an edge that causes the strut to have a tapered profile along the longitudinal axis of the strut.
Abstract:
A representative embodiment of the invention provides an infrared (IR) imaging system (300) adapted to (i) convert an IR image of an object into mechanical displacements of a plurality of movable plates (304,306), (ii) use the mechanical displacements to impart a corresponding spatial phase modulation pattern onto a beam of visible light, and (iii) apply spatial filtering to convert the spatial phase modulation pattern into a visible image of the object.
Abstract:
An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
Abstract:
Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.
Abstract:
A micro-electromechanical actuator employs metal for the hot arm and silicon for at least the flexible portion of the cold arm. The cold arm made of silicon is coupled to a metal wire that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.
Abstract:
A representative embodiment of the invention provides an infrared (IR) imaging system (300) adapted to (i) convert an IR image of an object into mechanical displacements of a plurality of movable plates (304,306), (ii) use the mechanical displacements to impart a corresponding spatial phase modulation pattern onto a beam of visible light, and (iii) apply spatial filtering to convert the spatial phase modulation pattern into a visible image of the object.
Abstract:
A high inductance, out-of -plane inductor is achieved by forming on a flat flexible base (103) conductive elements (105) that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors (109) may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.
Abstract:
A micro-electromechanical actuator (100) employs metal for the hot arm (101) and silicon for at least the flexible portion of the cold arm (105). The cold arm (105) made of silicon is coupled to a metal wire (107) that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.