THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH
    1.
    发明申请
    THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH 审中-公开
    用于基于MEMS的继电器开关的热致动器

    公开(公告)号:WO2009023088A1

    公开(公告)日:2009-02-19

    申请号:PCT/US2008/009081

    申请日:2008-07-25

    Abstract: A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an "active" arm that is movably mounted on a substrate. The "active" arm has (i) a thermal expansion layer and (H) -a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the "active" arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the "active" arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.

    Abstract translation: 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有(i)与热膨胀层电隔离的热膨胀层和(H) - 电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀,从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制,可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。

    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS
    2.
    发明申请
    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS 审中-公开
    高电感,超平面电感

    公开(公告)号:WO2008005224A2

    公开(公告)日:2008-01-10

    申请号:PCT/US2007/014759

    申请日:2007-06-25

    Inventor: PARDO, Flavio

    Abstract: A high inductance, out-of-plane inductor is achieved by forming on a flat flexible base conductive elements that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.

    Abstract translation: 通过在平坦的柔性基底导电元件上形成高电感,平面外的电感器来实现,该平坦的柔性基底导电元件以图案布置,使得当诸如聚合物膜的扁平柔性基底卷曲时,例如通过施加热量 导电元件同样卷曲,并且导电元件的不同导电元件的相对端被导电接触,并且可以被接合,以便使用至少两个导电元件形成导电线圈。 可以在柔性基座上形成附加的导体,以作为电线以提供到所得到的导电线圈的连接。 柔性基座的一部分,例如延伸超过线圈,可以用作一个或多个芯片,例如倒装芯片安装或其它部件附接到的基座。

    TAPERED REINFORCING STRUTS FOR MICROMACHINED STRUCTURES
    3.
    发明申请
    TAPERED REINFORCING STRUTS FOR MICROMACHINED STRUCTURES 审中-公开
    用于微结构结构的锥形加固件

    公开(公告)号:WO2009020526A1

    公开(公告)日:2009-02-12

    申请号:PCT/US2008/009058

    申请日:2008-07-25

    CPC classification number: B81B3/007 B81B2201/042 G02B26/0841

    Abstract: According to one embodiment, a reinforcing strut (240) of the invention is a polyhedron attached to a plate (212) and having at least two slanted facets, with each of the slanted facets oriented with respect to the plane of the plate at an angle different from about 90 degrees, Two slanted facets intersect to form an edge that causes the strut to have a tapered profile along the longitudinal axis of the strut.

    Abstract translation: 根据一个实施例,本发明的加强支柱(240)是连接到板(212)并具有至少两个倾斜小面的多面体,其中每个倾斜面相对于板的平面以一定角度 两个倾斜小平面与大约90度不同,两个倾斜的小平面相交以形成一个边缘,使得支柱沿着支柱的纵向轴线具有锥形轮廓。

    MEMS ACTUATOR
    6.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS致动器

    公开(公告)号:WO2009045346A2

    公开(公告)日:2009-04-09

    申请号:PCT/US2008/011212

    申请日:2008-09-26

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 装置包括邻近推动器组件的衬底,推动器组件和屈肌组件。 推杆组件包括热推和冷推臂。 热推和冷推臂的第一端固定在基板上。 热推动臂和冷推动臂的第二端联接在一起并悬挂以在基底上横向移位。 屈肌组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚定在基底上。 推动器组件被构造成用于引起屈肌臂的第二端和致动器在衬底上的接触的横向位移。 方法包括提供装置并使推动器组件横向移动屈肌臂的第二端和致动器接触在衬底上。

    MICRO-ACUTUATOR AND LOCKING SWITCH
    7.
    发明申请
    MICRO-ACUTUATOR AND LOCKING SWITCH 审中-公开
    微动器和锁定开关

    公开(公告)号:WO2008033269A2

    公开(公告)日:2008-03-20

    申请号:PCT/US2007/019526

    申请日:2007-09-07

    Inventor: PARDO, Flavio

    Abstract: A micro-electromechanical actuator employs metal for the hot arm and silicon for at least the flexible portion of the cold arm. The cold arm made of silicon is coupled to a metal wire that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.

    Abstract translation: 微机电致动器至少将冷臂的柔性部分用于热臂和硅的金属。 由硅制成的冷臂联接到与其一起移动的金属线,并且当至少两个这样的致动器形成开关时,用于承载要切换的信号。 第一芯片上的这种开关的阵列可以与倒装芯片接合到第一芯片的第二芯片协同地布置,第二芯片具有将电控制电流路由到各种热臂以加热它们的电线, 信号由各种开关切换。

    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS
    9.
    发明公开
    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS 审中-公开
    电感高的电感用于飞机户外使用

    公开(公告)号:EP2038901A2

    公开(公告)日:2009-03-25

    申请号:EP07796435.1

    申请日:2007-06-25

    Inventor: PARDO, Flavio

    Abstract: A high inductance, out-of -plane inductor is achieved by forming on a flat flexible base (103) conductive elements (105) that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors (109) may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.

    MICRO-ACUTUATOR AND LOCKING SWITCH
    10.
    发明公开
    MICRO-ACUTUATOR AND LOCKING SWITCH 审中-公开
    微型致动器和LOCK开关

    公开(公告)号:EP2067159A2

    公开(公告)日:2009-06-10

    申请号:EP07837880.9

    申请日:2007-09-07

    Inventor: PARDO, Flavio

    Abstract: A micro-electromechanical actuator (100) employs metal for the hot arm (101) and silicon for at least the flexible portion of the cold arm (105). The cold arm (105) made of silicon is coupled to a metal wire (107) that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.

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