公开(公告)号：EP1043280A1

公开(公告)日：2000-10-11

申请号：EP00302557.4

申请日：2000-03-28

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Wisk, Patrick William ,  Wynn, James Denis ,  Yan, Man Fei

IPC: C03B37/018

CPC classification number: C03B37/01869 ,  Y02P40/57

Abstract: The specification describes a process and apparatus (not claimed) for collapsing preform tubes in Modified Chemical Vapor Deposition processes. The problem of bubble formation during tube collapse was found to be attributable to excess dopant vapor pressure emitted from the hot zone during the final stage of tube collapse. This excess pressure is controlled by cooling (via means 63) the tube (61) in advance of the torch (62), thereby decreasing the viscosity of the dopant vapor and increasing its transport rate. This is found to reduce internal tube pressure and eliminate bubble formation in the collapsed preform.

Abstract translation: 本说明书描述了用于在改进的化学气相沉积工艺中塌缩预制管的方法和装置（未要求保护）。 发现管塌陷期间气泡形成的问题可归因于在管塌陷的最后阶段从热区发射的过量掺杂剂蒸气压。 通过在割炬（62）之前冷却（通过装置63）管（61）来控制该过剩压力，从而降低掺杂剂蒸气的粘度并增加其输送速率。 发现这可以减少内管压力并消除塌缩的预制件中的气泡形成。