Process for the Production of Micro-Structured Construction Units by Means of Optical Lithography
    1.
    发明申请
    Process for the Production of Micro-Structured Construction Units by Means of Optical Lithography 审中-公开
    通过光学平版印刷技术生产微结构构造单元的方法

    公开(公告)号:US20100196660A1

    公开(公告)日:2010-08-05

    申请号:US12699171

    申请日:2010-02-03

    Inventor: MARTIN DRESSLER

    Abstract: The invention relates to a method for producing micro-structured shaped parts (22) and the resulting products, wherein a first negative or positive photosensitive layer (12) with a layer thickness (D1) is deposited on a substrate (10) and the first negative or positive photosensitive layer (12) is exposed area-by-area with light of a suitable wavelength; a second negative or positive photosensitive layer (12′) with a layer thickness (D2) is deposited on the first negative or positive photosensitive layer (12) and exposed area-by-area with light of a suitable wavelength, wherein the exposed regions (16′) in the second layer (12′) are identical to and/or different from the exposed regions (16) in the first layer (12); the steps of depositing and exposing the photosensitive layer (12, 12′) area-by-area are performed repeatedly until a predetermined height H is attained, wherein the exposed regions (16, 16′) of the photosensitive layers (12, 12′) represent the positive or negative of the microstructure of the shaped part (22); the exposed (16, 16′) or the unexposed regions (18, 18′) of the shaped part (22) are washed out with a developer; and the remaining preform (20) is subsequently solidified.

    Abstract translation: 本发明涉及一种用于生产微结构成形部件(22)和所得产品的方法,其中具有层厚度(D1)的第一负或正感光层(12)沉积在基板(10)上,第一 负的或正的感光层(12)用合适的波长的光线逐个曝光; 具有层厚度(D2)的第二负或正感光层(12')沉积在第一负或正光敏层(12)上,并且用适当波长的光曝光逐个区域,其中曝光区域 16')与第一层(12)中的暴露区域(16)相同和/或不同; 反复进行逐层沉积和曝光感光层(12,12')的步骤,直到达到预定高度H,其中感光层(12,12')的曝光区域(16,16') )表示成形部(22)的微结构的正或负。 用显影剂冲洗成形部件(22)的暴露(16,16')或未曝光区域(18,18'); 然后将剩余的预制件(20)固化。

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