公开(公告)号：WO1998000698A1

公开(公告)日：1998-01-08

申请号：PCT/US1997011689

申请日：1997-06-30

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  FINOT, Marc ,  KESLER, Olivera ,  SURESH, Subra

IPC: G01N03/20

CPC classification number: G01N3/20 ,  B33Y80/00

Abstract: A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative to the preceding sample. By comparison of each sample to a preceding sample, properties of the topmost layer can be determined, and residual stress at any depth in each sample, resulting from deposition of the top layer, can be determined.

Abstract translation: 提出了一种用于确定多层样品中各层的性能如杨氏模量，热膨胀系数和残余应力的技术。 该技术包括制备一系列样品，每个样品相对于前述样品包括一个附加层。 通过比较每个样品与前一个样品，可以确定最上层的性质，并且可以确定由顶层沉积产生的每个样品中任何深度的残余应力。