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公开(公告)号:US3332810A
公开(公告)日:1967-07-25
申请号:US39748664
申请日:1964-09-18
Applicant: MATSUSHITA ELECTRONICS CORP
Inventor: EISHUN KIMURA
IPC: H01L21/223 , H01L29/00 , H01L29/04
CPC classification number: H01L29/04 , H01L21/223 , H01L29/00 , Y10S257/926