-
公开(公告)号:JP2530933B2
公开(公告)日:1996-09-04
申请号:JP9479390
申请日:1990-04-10
Applicant: MATSUSHITA ELECTRONICS CORP
Inventor: UEDA TETSUZO , MYANAGA KAZUTSUNE
IPC: H01L21/60 , H01L21/338 , H01L29/812
-
公开(公告)号:JP2530932B2
公开(公告)日:1996-09-04
申请号:JP9479290
申请日:1990-04-10
Applicant: MATSUSHITA ELECTRONICS CORP
Inventor: UEDA TETSUZO , MYANAGA KAZUTSUNE
IPC: H01L21/60 , H01L21/338 , H01L29/812
-