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公开(公告)号：US3346428A
公开(公告)日：1967-10-10
申请号：US43285865
申请日：1965-02-15
Applicant: MATSUSHITA ELECTRONICS CORP
Inventor： IWAO TERAMOTO , HITOO IWASA , SHOSUKE SHINODA
CPC classification number: C30B31/02 , H01L21/00 , Y10S148/043 , Y10S148/049 , Y10S148/118 , Y10S148/151
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