公开(公告)号：FR2817629A1

公开(公告)日：2002-06-07

申请号：FR0015625

申请日：2000-12-01

Applicant: MEMSCAP

Inventor： HELIN PHILIPPE ,  BOUROUINA TARIK ,  REYNE GILBERT ,  HOULET LIONEL ,  FUJITA HIROYUKI

IPC: G02B6/35 ,  G02B26/08 ,  G02B6/24 ,  H04B10/20

Abstract: The invention concerns a method for making an optical switch (1) comprising: an alignment structure (2) comprising several grooves (3, 4) produced on the surface (10) of a silicon-on-insulator substrate (9), each groove (3, 4) being designed to receive an optical fibre adapted to emit a light beam; a reflecting structure (6) adapted to move between two positions, namely: a reflecting position, wherein the reflecting structure (6) is designed to redirect the optical beam derived from a first optical fibre (45) towards a second optical fibre (46); a transmitting position, wherein the reflecting structure (6) is designed to enable the beam (45) of the first optical fibre (45) to continue its propagation in its initial direction. The invention is characterised in that it comprises two successive etching steps, namely: a step which consists in dry anisotropic etching of the substrate to define the general shape (17) of the reflecting structure (6); a subsequent wet etching step which enables both to define the final shape of the reflecting structure (6) and to define an alignment structure (2); an etching step carried out on the surface of the substrate opposite the reflecting structure, enabling to define the shape of deformable zones connecting the reflecting structure to the rest of the substrate; a final step which consists in eliminating the silicon dioxide layer enabling to release the reflecting structure.

公开(公告)号：AU2207702A

公开(公告)日：2002-06-11

申请号：AU2207702

申请日：2001-11-29

Applicant: MEMSCAP

Inventor： HELIN PHILIPPE ,  BOUROUINA TARIK ,  REYNE GILBERT ,  HOULET LIONEL ,  FUJITA HIROYUKI

IPC: G02B6/35 ,  G02B26/02