公开(公告)号：SG92755A1

公开(公告)日：2002-11-19

申请号：SG200006502

申请日：2000-10-25

Applicant: MICROCOATING TECHNOLOGIES INC

Inventor： ANDREW T HUNT ,  WEN-YI LIN ,  RICHARD W CARPENTER

IPC: H01C13/00 ,  H01G4/10 ,  B32B7/02 ,  H01G4/30 ,  H01G4/33 ,  H01G4/40 ,  H05K1/16 ,  H05K3/46 ,  H01L27/10 ,  H01L27/01

Abstract: Nanolaminates are formed by alternating deposition, e.g., by combustion chemical vapor deposition (CCVD), layers of resistive material (11) and layers of dielectric material (12). Outer resistive material layers (11) are patterned to form discrete patches of resistive material. Electrical pathways between opposed patches of resistive material (11) on opposite sides of the laminate (10) act as capacitors. Electrical pathways horizontally through resistive material layers (11), which may be connected by via plated holes (14), act as resistors.