公开(公告)号：MY158140A

公开(公告)日：2016-09-15

申请号：MYPI2011003250

申请日：2011-07-11

Applicant: MIMOS BERHAD

Inventor： ANEES BT ABDUL AZIZ ,  DANIEL BIEN CHIA SHENG

IPC: G01N27/12

Abstract: THE PRESENT INVENTION RELATES GENERALLY TO A NANOSTRUCTURED SENSING DEVICE COMPRISES OF A SUPPORT STRUCTURE (101), AT LEAST ONE SUSPENDED RESISTOR STRUCTURE (103) WHICH IS FORMED PERPENDICULAR TO SAID SUPPORT STRUCTURE (101) AND A PLURALITY OF SENSING ELEMENTS (209) BEING ASSEMBLED ONTO SAID RESISTOR STRUCTURE (103), WHEREIN SAID RESISTOR STRUCTURE (103) IS ANCHORED TO SAID SUPPORT STRUCTURE (101) VIA AT LEAST ONE HINGE PAD (105). SAID SENSING DEVICE OF THE PRESENT INVENTION CAN BE FABRICATED BY TWO DIFFERENT APPROACHES, EITHER SAID HINGE PAD (105) IS BEING DEPOSITED FIRST AND FOLLOWED BY THE GROW OF SAID PLURALITY OF SENSING ELEMENTS (209) ON BOTH TOP AND BOTTOM OF SAID RESISTOR STRUCTURE (103) OR SAID PLURALITY OF SENSING ELEMENTS (209) IS GROWN BEFORE SAID HINGE PAD (105) IS DEPOSITED. (THE MOST ILLUSTRATIVE