公开(公告)号：MY154211A

公开(公告)日：2015-05-15

申请号：MYPI2011700063

申请日：2011-04-26

Applicant: MIMOS BERHAD

Inventor： SULAIMAN SURAYA ,  MOHSEN NABIPOOR DR ,  YIN CHIA CHIEU YIN CHEE CHIEU

IPC: G01N27/22

Abstract: The present invention relates to a humidity sensor device. The humidity sensor device (100) comprises of at least two contact pads (110), a sensing capacitor (120), a reference capacitor (130), and a control circuit (140). The sensing capacitor (120) is an interdigital capacitor and it is divided into at least two sub-capacitors (120a, 120b, 120c, 120n). The control unit (140) determines the number of sub capacitors (120a, 120b, 120c, 120n) to be connected to the contact pads (110) by measuring the capacitance value of the reference capacitor (130) and controlling the switches (124) of the sensing capacitor (120) based on the variation in sensing material thickness of the reference capacitor (130). The most illustrative drawing: