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    AN ENERGY HARVESTER
    3.
    发明专利
    AN ENERGY HARVESTER 未知

    公开(公告)号：MY146160A

    公开(公告)日：2012-06-29

    申请号：MYPI20083637

    申请日：2008-09-18

    Applicant: MIMOS BERHAD

    Inventor： MUKTER-UZ-ZAMAN A S M ,  OTHMAN MASURI ,  SULAIMAN SURAYA ,  BHUYAN MOHAMMAD SHAHARIA ,  TAMSIR AGUS SANTOSO

    IPC: H02N2/00

    Abstract: AN ENERGY HARVESTER (100) COMPRISING A BASE (110); ONE OR MORE FIRST RESILIENT MEANS (120) MOUNTED ON THE BASE (110); A HOLLOW CHAMBER (130) HAVING A MOUNTING POINT (131) PIVOTALLY ATTACHED TO THE FIRST RESILIENT MEANS (120) IN STATIC EQUILIBRIUM IN SUCH A WAY THAT CENTRE OF MASS OF THE HOLLOW CHAMBER (130) IS ALIGNED WITH THE FIRST RESILIENT MEANS (120) AT THE VERTICAL AXIS; A HOLLOW MEMBER (140) ENCLOSED WITHIN THE HOLLOW CHAMBER (130) BEING ATTACHED TO ONE OR MORE SECOND RESILIENT MEANS (150) EXTENDING FROM THE MOUNTING POINT (131) IN STATIC EQUILIBRIUM THAT CENTRE OF MASS OF THE HOLLOW MEMBER (140) IS ALIGNED WITH THE SECOND RESILIENT MEANS (150) AT THE VERTICAL AXIS; A PLURALITY OF PIEZOELECTRIC MATERIAL-BUILT CANTILEVERS (160) MOUNTED ON THE HOLLOW MEMBER (140) AND SPACED APART FROM ONE ANOTHER IN A PREDETERMINED GAP AT THE VERTICAL PLANAR THAT THE PIEZOELECTRIC MATERIAL-BUILT CANTILEVERS (160) ARE VARIED IN LENGTH AND/OR CENTRE OF MASS; A PRIMARY STORAGE (170) ASSOCIATED WITH THE HOLLOW CHAMBER (130), THE HOLLOW MEMBER (140) AND THE PLURALITY OF PIEZOELECTRIC MATERIAL- BUILT CANTILEVERS (160) THROUGH AN INTEGRATED CIRCUIT FOR STORING HARVESTED ENERGY; WHEREIN THE ENERGY IS HARVESTED THROUGH VIBRATION OF THE PLURALITY OF PIEZOELECTRIC MATERIAL-BUILT CANTILEVERS (160) AT ITS APPROXIMATELY RESONANT FREQUENCY, RECIPROCATION OF THE HOLLOW CHAMBER (130) AND THE HOLLOW MEMBER (140) UPON APPLYING KINETIC FORCE.

    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES
    4.
    发明专利
    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES 未知

    公开(公告)号：MY147014A

    公开(公告)日：2012-10-15

    申请号：MYPI20071872

    申请日：2007-10-31

    Applicant: MIMOS BERHAD

    Inventor： TAMSIR AGUS SANTOSO DR ,  MANUT AZRIF ,  SULAIMAN SURAYA

    IPC: G01C19/56 ,  G01C19/5656

    Abstract: THERE IS DISCLOSED A SURFACE MICROMACHINED (MEMS) GYROSCOPE DEVICE WHERE THE RESONANCE FREQUENCIES ARE CAPABLE OF BEING ADJUSTED AND TUNED FOR OBTAINING MAXIMUM RESPONSE GAIN FOR HIGHER SENSITIVITY. THE MEMS GYROSCOPE COMPRISES OF A SUBSTRATE (1), A PROOF-MASS (2), A CAPACITIVE AREA-CHANGED PLATE (3), A DRIVING MODE ELECTRODE (4) AND A SENSING MODE ELECTRODE (5). THE PROOF-MASS (2) IS STRUCTURED AS A CROSS-SHAPED BODY THAT INCLUDES THE SENSING MODE AND DRIVING MODE ELECTRODES (4, 5) WHERE THE PROOF-MASS IS ADAPTED TO OSCILLATE BACK AND FORTH LATERALLY IS OVER THE CAPACITIVE AREA-CHANGED PLATE (3) DEFINING AN AREA-CHANGED CAPACITIVE TYPE MEMS GYROSCOPE. THE DRIVING AND SENSING MODE ELECTRODES (4, 5) ARE SHAPED AS A SYMMETRICAL BRANCH-FINGER STRUCTURE. THE PROOF- MASS IS CONNECTED TO THE SUBSTRATE (1) THROUGH A SPRING (6) AND THE BRANCH-FINGER STRUCTURE IS PROVIDED HAVING TWO DIFFERENT GAP SIDE-BY-SIDE AND NARROW-WIDE NARROW GAP SERIES CONFIGURATION, WHEREBY THE SPRING IS CONFIGURED AS A CIRCULAR-SHAPED, RECTANGULAR-SHAPED OR VARIATIONS OF THE SAME. THE SPRING CONSTANT (KX, KY) IS CONTROLLABLE AND ADJUSTABLE THROUGH THE APPLICATION OF VOLTAGE ON THE BRANCH FINGER ACTING AS ACTUATOR AND PSEUDO SPRING THUS PROVIDING TUNED RESONANT FREQUENCY FOR HIGHER SENSITIVITY.

    A HUMIDITY SENSOR DEVICE
    5.
    发明专利
    A HUMIDITY SENSOR DEVICE 未知

    公开(公告)号：MY154211A

    公开(公告)日：2015-05-15

    申请号：MYPI2011700063

    申请日：2011-04-26

    Applicant: MIMOS BERHAD

    Inventor： SULAIMAN SURAYA ,  MOHSEN NABIPOOR DR ,  YIN CHIA CHIEU YIN CHEE CHIEU

    IPC: G01N27/22

    Abstract: The present invention relates to a humidity sensor device. The humidity sensor device (100) comprises of at least two contact pads (110), a sensing capacitor (120), a reference capacitor (130), and a control circuit (140). The sensing capacitor (120) is an interdigital capacitor and it is divided into at least two sub-capacitors (120a, 120b, 120c, 120n). The control unit (140) determines the number of sub capacitors (120a, 120b, 120c, 120n) to be connected to the contact pads (110) by measuring the capacitance value of the reference capacitor (130) and controlling the switches (124) of the sensing capacitor (120) based on the variation in sensing material thickness of the reference capacitor (130). The most illustrative drawing:

    RADIO FREQUENCY MEMS SWITCH
    6.
    发明专利
    RADIO FREQUENCY MEMS SWITCH 未知

    公开(公告)号：MY146154A

    公开(公告)日：2012-06-29

    申请号：MYPI20071873

    申请日：2007-10-31

    Applicant: MIMOS BERHAD

    Inventor： SULAIMAN SURAYA ,  SYONI MOHD ISMAHADI

    IPC: H01L29/00

    Abstract: THERE IS DISCLOSED A METHOD OF FABRICATING RADIO FREQUENCY SURFACE MICROELECTROMECHANICAL (MEMS) SWITCH. THE METHOD UTILIZES FOUR MASKS, EACH CONFIGURED THROUGH PHOTOLITHOGRAPHY PROCESS AT DIFFERENT STAGES THAT RESULTED IN SUBSTANTIALLY PLANAR SILICON DIOXIDE, CRITICAL IN PROVIDING BETTER MECHANICAL PERFORMANCE OF THE RF MEMS SWITCH. THE STEPS INCLUDE, AMONG OTHERS, DEPOSITING SILICON ON GLASS LIQUID TO FILL SMALL HOLES FOR A SMOOTH SILICON OXIDE SURFACE, EMPLOYING BACK ETCH PROCESS AND PERFORMING WET ETCHING BY USING CHEMICAL SOLUTION CALLED PAD ETCH. AN RF MEMS SWITCH THAT COMPRISE OF A LOWER ELECTRODE (30) FORMED ON THE SURFACE OF A SILICON SUBSTRATE (31), AN ALUMINUM MEMBRANE (32) SUSPENDED OVER THE ELECTRODE AND A DIELECTRIC LAYER (33) COVERING THE LOWER ELECTRODE FABRICATED THROUGH THE PROCESS IS ALSO DISCLOSED.

    VIBRATORY SENSOR
    9.
    发明专利
    VIBRATORY SENSOR 未知

    公开(公告)号：MY145205A

    公开(公告)日：2012-01-13

    申请号：MYPI20072343

    申请日：2007-12-28

    Applicant: MIMOS BERHAD

    Inventor： TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  ALIAS DZUZLINDAH MUHAMAD ,  MANUT AZRIF ,  ZAKARIA AZLAN

    IPC: H01L27/04

    Abstract: VIBRATORY SENSOR 5 A CAPACITOR COMPRISES A DIELECTRIC BASE LAYER (4A) DEFINED BY TOP, FIRST AND SIDE SURFACES; A PLURALITY OF FIRST DRIVEN ELECTRODE (I 5) HAVING TIPS AND EDGES DEPOSITED ON THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) THAT EACH ARE SPACED APART AT THE EDGES BY A PREDETENNINED GAP; A PLURALITY OF FIRST SENSING ELECTRODE (16) HAVING TIPS AND EDGES THAT EACH OF THE FIRST SENSING ELECTRODE (16) IS DEPOSITED AT EACH OF THE 10 PREDETEN-NINED GAP IN BETWEEN TWO FIRST DRIVEN ELECTRODES (15) WITH A PREDETERMINED DISTANCE IN BETWEEN THE FIRST SENSING (16) AND FIRST DRIVEN ELECTRODES (15); A PLURALITY PAIR OF PROTRUSION (20) EXTENDS UPWARD FROM THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) AT THE TIPS OF THE FIRST DRIVEN ELECTRODES (I 5) AND THE FIRST SENSING ELECTRODES (I 6); A SECOND DRIVEN ELECTRODE (IO) OR A SECOND SENSING ELECTRODE (II) ARE POSITIONED 1 5 OVERHEAD OF EACH FIRST DRIVEN ELECTRODE (15) AND FIRST SENSING ELECTRODE (16) RESPECTIVELY BY ANCHORING ONTO THE CORRESPONDING PAIR OF PROTRUSIONS (20) WITH A VOID LEFT BETWEEN EACH SECOND AND FIRST ELECTRODES.- WHEREBY THE SECOND DRIVEN (10) AND SECOND SENSING (I 1) ELECTRODES VIBRATE UP AND DOWN BY APPLYING A BIAS VOLTAGE ONTO THE FIRST DRIVEN (I 5) AND FIRST SENSING (I 6) ELECTRODES THUS ABLE TO MANIPULATE 20 PENETRATION DEPTH OF QUASI-STATIC ELECTRIC FIELD LINES PRODUCED FROM THE SECOND DRIVEN (I 0) AND SECOND SENSING ELECTRODES (I 1) INTO A MATERIAL UNDER TEST. (MOST ILLUSTRATED BY

    RADIO FREQUENCY MEMS SWITCH
    10.
    发明申请
    RADIO FREQUENCY MEMS SWITCH 审中-公开
    无线电频率MEMS开关

    公开(公告)号：WO2009057988A2

    公开(公告)日：2009-05-07

    申请号：PCT/MY2008000122

    申请日：2008-10-22

    Applicant: MIMOS BERHAD ,  SULAIMAN SURAYA ,  SYONO MOHD ISMAHADI

    Inventor： SULAIMAN SURAYA ,  SYONO MOHD ISMAHADI

    IPC: H01L29/00 ,  H01H59/00

    CPC classification number: H01H1/0036 ,  H01G5/18 ,  H01H59/0009

    Abstract: There is disclosed a method of fabricating radio frequency surface microelectromechanical (MEMS) switch. The method utilizes four masks, each configured through photolithography process at different stages that resulted in substantially planar silicon dioxide, critical in providing better mechanical performance of the RF MEMS switch. The steps include, among others, depositing silicon on glass liquid to fill small holes for a smooth silicon oxide surface, employing back etch process and performing wet etching by using chemical solution called Pad Etch. An RF MEMS switch that comprise of a lower electrode (30) formed on the surface of a silicon substrate (31), an aluminum membrane (32) suspended over the electrode and a dielectric layer (33) covering the lower electrode fabricated through the process is also disclosed.

    Abstract translation: 公开了一种制造射频表面微机电（MEMS）开关的方法。 该方法利用四个掩模，每个掩模均通过不同阶段的光刻工艺配置，导致基本平面的二氧化硅，这对于提供RF MEMS开关的更好的机械性能至关重要。 其中的步骤包括在玻璃液体上沉积硅以填充平滑氧化硅表面的小孔，采用背面蚀刻工艺并通过使用称为刮板蚀刻的化学溶液进行湿法蚀刻。 一种RF MEMS开关，包括形成在硅衬底（31）表面上的下电极（30），悬置在电极上的铝膜（32）和覆盖通过该工艺制造的下电极的介电层（33） 也被披露。

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