公开(公告)号：MY178352A

公开(公告)日：2020-10-08

申请号：MYPI20071674

申请日：2007-10-01

Applicant: MIMOS BERHAD

Inventor： MOHD ISMAHADI SYONO ,  ROZINA ABD RANI ,  LEE HING WAH

Abstract: The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.