公开(公告)号：WO2014185771A2

公开(公告)日：2014-11-20

申请号：PCT/MY2014/000093

申请日：2014-05-02

Applicant: MIMOS BERHAD

Inventor： WAI YEE, Lee ,  MOHSEN, Nabipoor ,  CHIA SHENG, Daniel Bien ,  SURAYA, Sulaiman

IPC: G01N27/22

CPC classification number: G01N27/223

Abstract: The present invention relates to a capacitive humidity sensor (100) comprising: a semiconductor substrate (101); an insulating layer (103) rests on the semiconductor substrate (101); a sensing membrane (105); a plurality of interdigitated electrodes (107); and a plurality of electrode contacts (109); characterised in that the present invention having ground plane connections (111) and the interdigitated electrodes (107) are sandwiched by the sensing membrane (105). The ground plane connections (111) and the sandwiching sensing membrane (105) are configured to eliminate stray capacitance and to provide optimal utilisation of fringing field effectrespectively.

Abstract translation: 本发明涉及一种电容式湿度传感器（100），包括：半导体衬底（101）; 绝缘层（103）位于半导体衬底（101）上; 感测膜（105）; 多个叉指电极（107）; 和多个电极触点（109）; 其特征在于，具有接地平面连接（111）和交错电极（107）的本发明被传感膜（105）夹持。 接地平面连接（111）和夹层感测膜（105）被配置为消除杂散电容并且分别提供边缘场效应的最佳利用。