公开(公告)号：WO2011139137A1

公开(公告)日：2011-11-10

申请号：PCT/MY2011/000034

申请日：2011-04-19

Applicant: MIMOS BERHAD ,  DANIEL, Bien Chia Sheng ,  TEH, Aun Shih ,  MOHSEN, Nabipoor

Inventor： DANIEL, Bien Chia Sheng ,  TEH, Aun Shih ,  MOHSEN, Nabipoor

IPC: H01G7/00 ,  B82B3/00 ,  C01B31/00

CPC classification number: H01G7/00

Abstract: The present invention provides a device with carbon nanotubes wherein the nanotubes (20) are grown vertically onto the substrate surface and in-between the fingers of an interdigital structure. The completed array of conductive interdigitated fingers with a plurality of the vertical carbon nanotubes are then integrated as an interdigital device where this device operates based on the fringing electric field effects. At least two conductive fingers (22) spaced apart act as electrodes of capacitor. A plurality of carbon nanotubes (20) is vertically formed on top of conductive fingers or between conductive fingers. Carbon nanotubes have permittivity which changes according to environment, hence affecting capacitance measured. Different embodiments of device having the nanotubes placed in trench are shown. The carbon nanotube interdigital device can operate as a sensor for application in areas of agriculture, aquaculture, environmental monitoring and biomedical.

Abstract translation: 本发明提供了一种具有碳纳米管的器件，其中纳米管（20）垂直生长在衬底表面上并且在叉指结构的指状物之间生长。 然后将具有多个垂直碳纳米管的导电交叉指状物的完整阵列作为叉指装置集成，其中该装置基于边缘电场效应进行操作。 间隔开的至少两个导电指状物（22）用作电容器的电极。 多个碳纳米管（20）垂直形成在导电指状物的顶部或导电指状物之间。 碳纳米管具有根据环境而变化的介电常数，因此影响测量的电容。 示出了具有放置在沟槽中的纳米管的器件的不同实施例。 碳纳米管叉指装置可用作农业，水产养殖，环境监测和生物医学领域的传感器。

公开(公告)号：WO2012067488A1

公开(公告)日：2012-05-24

申请号：PCT/MY2011/000136

申请日：2011-06-23

Applicant: MIMOS BERHAD ,  DANIEL, Bien Chia Sheng ,  MOHSEN, Nabipoor ,  MUHAMAD RAMDZAN, Buyong ,  AZLINA, Mohd Zain ,  RAHIMAH, Mohd Saman ,  SITI AISHAH, Mohamad Badaruddin ,  ABDUL GHANI, Othaman

Inventor： DANIEL, Bien Chia Sheng ,  MOHSEN, Nabipoor ,  MUHAMAD RAMDZAN, Buyong ,  AZLINA, Mohd Zain ,  RAHIMAH, Mohd Saman ,  SITI AISHAH, Mohamad Badaruddin ,  ABDUL GHANI, Othaman

IPC: G01N27/22

CPC classification number: G01N27/223

Abstract: The present invention relates to a sensor for determining humidity. A humidity sensor (30) comprises of a substrate (32); a bottom membrane (34) positioned above the substrate (32) and a top membrane (36) positioned above the bottom membrane (34) forming a dielectric layer (38); and a plurality of inter-digitated electrodes (40) with changing capacitance in accordance to change in humidity detected by the dielectric layer (38) embedded to the top membrane (36) wherein a plurality of trenches (42) are embedded to the bottom membrane (34) or to the substrate (32) thereby increasing area of exposure to humidity. The present invention also relates to a method for fabricating a humidity sensor.

Abstract translation: 本发明涉及一种用于确定湿度的传感器。 湿度传感器（30）包括基底（32）; 位于所述基底（32）上方的底部膜（34）和位于所述底部膜（34）上方形成介电层（38）的顶部膜（36）。 以及多个数字化电极（40），其根据由嵌入到所述顶部膜（36）中的所述电介质层（38）检测到的湿度变化而改变电容，其中多个沟槽（42）嵌入所述底部膜 （34）或衬底（32），从而增加暴露于湿度的面积。 本发明还涉及一种制造湿度传感器的方法。

公开(公告)号：WO2012148254A1

公开(公告)日：2012-11-01

申请号：PCT/MY2012/000083

申请日：2012-04-17

Applicant: MIMOS BERHAD ,  MOHSEN, Nabipoor ,  SURAYA, Sulaiman ,  CHIA, Chieu Yin

Inventor： MOHSEN, Nabipoor ,  SURAYA, Sulaiman ,  CHIA, Chieu Yin

IPC: G01N27/22

CPC classification number: G01N27/225

Abstract: The present invention relates to a humidity sensor device. The humidity sensor device (100) comprises of at least two contact pads (110), a sensing capacitor (120), a reference capacitor (130), and a control circuit (140). The sensing capacitor (120) is an interdigital capacitor and it is divided into at least two sub- capacitors (120a, 120b, 120c, 120n). The control unit (140) determines the number of sub capacitors (120a, 120b, 120c, 120n) to be connected to the contact pads (110) by measuring the capacitance value of the reference capacitor (130) and controlling the switches (124) of the sensing capacitor (120) based on the variation in sensing material thickness of the reference capacitor (130).

Abstract translation: 本发明涉及湿度传感器装置。 湿度传感器装置（100）包括至少两个接触垫（110），感测电容器（120），参考电容器（130）和控制电路（140）。 感测电容器（120）是叉指电容器，并且被分成至少两个子电容器（120a，120b，120c，120n）。 控制单元（140）通过测量参考电容器（130）的电容值并控制开关（124）来确定要连接到接触焊盘（110）的副电容器（120a，120b，120c，120n）的数量， 基于参考电容器（130）的感测材料厚度的变化来检测感测电容器（120）。

公开(公告)号：WO2015170957A1

公开(公告)日：2015-11-12

申请号：PCT/MY2015/000022

申请日：2015-04-22

Applicant: MIMOS BERHAD ,  TEH, Aun Shih ,  MOHSEN, Nabipoor

Inventor： TEH, Aun Shih ,  MOHSEN, Nabipoor ,  LEE, Hing Wah ,  DANIEL, Bien Chia Sheng ,  SAAT, Shukri Bin Embong

IPC: G01L9/00

CPC classification number: G01L27/002 ,  G01L9/0075

Abstract: The present invention relates to pressure sensor and more particularly self-calibrated miniaturized pressure sensor designed for monitoring applications in automotive, industrial, medical and consumer products. One of the advantages of the present invention is able to detect self-calibration of the pressure sensor at both the initial state of the device or during operation. Another advantage of the present invention is that the self-calibrated miniaturized pressure sensor of the present invention enables the user to know the exact condition of the deformed diaphragm structure to ensure that the measured results are representative of the actual applied external pressure instead of the internal mechanical failure of the diaphragm structure. The present invention further provides a considerable reduction of materials with even greater efficiency and economically during operation.

Abstract translation: 本发明涉及压力传感器，特别是自校准的小型化压力传感器，用于监测汽车，工业，医疗和消费产品中的应用。 本发明的优点之一是能够在设备的初始状态或操作期间检测压力传感器的自校准。 本发明的另一个优点是，本发明的自校准的小型压力传感器使得用户能够知道变形的隔膜结构的确切状况，以确保测量结果代表实际施加的外部压力而不是内部的 隔膜结构的机械故障。 本发明进一步提供了在操作期间具有更高效率和经济性的材料的显着减少。

公开(公告)号：WO2015080548A1

公开(公告)日：2015-06-04

申请号：PCT/MY2014/000113

申请日：2014-05-26

Applicant: MIMOS BERHAD

Inventor： BIEN, Daniel Chia Seng ,  MOHSEN, Nabipoor ,  TEH, Aun Shih ,  LEE, Wai Yee ,  LEE, Hing Wah

IPC: G01L9/00

CPC classification number: G01L9/0055

Abstract: The present invention relates to a piezoresistive pressure sensor which detects applied pressure by measuring the change of electrical conductivity of the magnetic nanoparticles (3) in response to the application of mechanical stress onto the diaphragm (1). The pressure sensor comprises conductive electrodes (2) formed on the diaphragm (1) which is provided on a substrate (4). Magnetic nanoparticles (3) are deposited on the conductive electrodes (2) for electrically connecting the conductive electrodes (2) and changing electrical conductivity when stress is applied.

Abstract translation: 压阻式压力传感器本发明涉及一种压阻式压力传感器，其通过测量磁性纳米颗粒（3）响应于在膜片（1）上施加机械应力的电导率的变化来检测施加的压力。 压力传感器包括形成在隔膜（1）上的设置在基板（4）上的导电电极（2）。 在导电电极（2）上沉积磁性纳米颗粒（3），用于电连接导电电极（2），并在施加应力时改变电导率。

公开(公告)号：WO2014185771A2

公开(公告)日：2014-11-20

申请号：PCT/MY2014/000093

申请日：2014-05-02

Applicant: MIMOS BERHAD

Inventor： WAI YEE, Lee ,  MOHSEN, Nabipoor ,  CHIA SHENG, Daniel Bien ,  SURAYA, Sulaiman

IPC: G01N27/22

CPC classification number: G01N27/223

Abstract: The present invention relates to a capacitive humidity sensor (100) comprising: a semiconductor substrate (101); an insulating layer (103) rests on the semiconductor substrate (101); a sensing membrane (105); a plurality of interdigitated electrodes (107); and a plurality of electrode contacts (109); characterised in that the present invention having ground plane connections (111) and the interdigitated electrodes (107) are sandwiched by the sensing membrane (105). The ground plane connections (111) and the sandwiching sensing membrane (105) are configured to eliminate stray capacitance and to provide optimal utilisation of fringing field effectrespectively.

Abstract translation: 本发明涉及一种电容式湿度传感器（100），包括：半导体衬底（101）; 绝缘层（103）位于半导体衬底（101）上; 感测膜（105）; 多个叉指电极（107）; 和多个电极触点（109）; 其特征在于，具有接地平面连接（111）和交错电极（107）的本发明被传感膜（105）夹持。 接地平面连接（111）和夹层感测膜（105）被配置为消除杂散电容并且分别提供边缘场效应的最佳利用。

公开(公告)号：WO2011149331A1

公开(公告)日：2011-12-01

申请号：PCT/MY2011/000036

申请日：2011-04-19

Applicant: MIMOS BERHAD ,  MUHAMAD, Ramdzan ,  BIEN CHIA SHE, Daniel ,  AZLINA, Mohd Zain ,  SITI, Aishah Bharuddin ,  RAHIMAH, Mohd Saman ,  ABD, Ghani Othaman ,  MOHSEN, Nabipoor

Inventor： MUHAMAD, Ramdzan ,  BIEN CHIA SHE, Daniel ,  AZLINA, Mohd Zain ,  SITI, Aishah Bharuddin ,  RAHIMAH, Mohd Saman ,  ABD, Ghani Othaman ,  MOHSEN, Nabipoor

IPC: G01N27/22 ,  F25D21/02 ,  H01G7/00

CPC classification number: H01G7/00 ,  G01N27/223

Abstract: A novel humidity sensor is described. The capacitive humidity sensor comprises at least two pairs of electrode contact pads (24) spaced apart; and a moisture sensitive film (26) formed around the electrode contact pads. The sensor is characterized in that, at least a pair of metals (28) connect the electrode contact pads to form a pair of l-shaped electrodes of a capacitor, wherein the capacitance measured changes according to humidity. Another sensor embodiment can be formed with contact pads exposed at two side of the moisture sensitive film. A method of fabricating the sensor is also described.

Abstract translation: 描述了一种新颖的湿度传感器。 电容式湿度传感器包括间隔开的至少两对电极接触焊盘（24）; 和形成在电极接触垫周围的湿敏膜（26）。 传感器的特征在于，至少一对金属（28）连接电极接触焊盘以形成电容器的一对l形电极，其中所测量的电容根据湿度而变化。 另一个传感器实施例可以形成有暴露在湿敏膜两侧的接触垫。 还描述了制造传感器的方法。