Monitoring system for coating a substrate
    1.
    发明授权
    Monitoring system for coating a substrate 失效
    用于涂覆基材的监测系统

    公开(公告)号:US3892490A

    公开(公告)日:1975-07-01

    申请号:US44868374

    申请日:1974-03-06

    CPC classification number: G01N21/8422 G01B11/0633

    Abstract: A monitoring system and method of producing a multi-layered coating such as a non-classical anti-reflecting coating on a substrate such as an optical lens is provided. The substrate is coated with material in a sealed housing. A beam of energy such as light having a variable wavelength across a predetermined range is directed to contact the coating material on the substrate. A portion of the beam is monitored after it contacts the coating material to provide a plurality of corresponding monitoring signals indicative of the optical thickness of the coating. The monitoring signals are compared with a predetermined range of values corresponding to the desired optical thickness. When all of the monitoring signals are respectively matched with the predetermined values, the deposition of material is stopped. The predetermined values and the monitoring signals can be simultaneously displayed on a visual display screen for comparison by an operator. The beam of energy can be monitored before it contacts the coating material and the resulting signal can be compared through a differential amplifier with the resulting monitoring signals to insure that any fluctuations in the energy source will not influence the monitoring signals. Alternatively, the beam can be filtered to provide a derivative single monitoring wavelength beam varying from the design wavelength that would provide an extreme limit of reflection for the desired optical thickness.

    Abstract translation: 提供了在诸如光学透镜的基板上制造诸如非经典的抗反射涂层之类的多层涂层的监控系统和方法。 衬底在密封外壳中涂覆材料。 诸如具有在预定范围上具有可变波长的光的能量束被引导以接触衬底上的涂层材料。 梁的一部分在其接触涂层材料之后被监测,以提供指示涂层的光学厚度的多个对应的监测信号。 将监视信号与对应于期望的光学厚度的预定值范围进行比较。 当所有监视信号分别与预定值相匹配时,停止材料的沉积。 预定值和监视信号可以同时显示在视觉显示屏幕上,以供操作者进行比较。 能量束可以在其接触涂层材料之前被监测,并且可以通过差分放大器与所得到的监测信号比较所得到的信号,以确保能量源的任何波动不会影响监测信号。 或者,可以对光束进行滤波以提供从设计波长变化的衍生单个监视波长光束,其将为期望的光学厚度提供反射的极限。

    2.
    发明专利
    失效

    公开(公告)号:JPS5844961B2

    公开(公告)日:1983-10-06

    申请号:JP2655675

    申请日:1975-03-06

    Abstract: A monitoring system and method of producing a multi-layered coating such as a non-classical anti-reflecting coating on a substrate such as an optical lens is provided. The substrate is coated with material in a sealed housing. A beam of energy such as light having a variable wavelength across a predetermined range is directed to contact the coating material on the substrate. A portion of the beam is monitored after it contacts the coating material to provide a plurality of corresponding monitoring signals indicative of the optical thickness of the coating. The monitoring signals are compared with a predetermined range of values corresponding to the desired optical thickness. When all of the monitoring signals are respectively matched with the predetermined values, the deposition of material is stopped. The predetermined values and the monitoring signals can be simultaneously displayed on a visual display screen for comparison by an operator. The beam of energy can be monitored before it contacts the coating material and the resulting signal can be compared through a differential amplifier with the resulting monitoring signals to insure that any fluctuations in the energy source will not influence the monitoring signals. Alternatively, the beam can be filtered to provide a derivative single monitoring wavelength beam varying from the design wavelength that would provide an extreme limit of reflection for the desired optical thickness.

    FOCUSING TYPE OPTICAL TRANSMISSION BODY ARRAY

    公开(公告)号:JPS5545070A

    公开(公告)日:1980-03-29

    申请号:JP11898278

    申请日:1978-09-26

    Abstract: PURPOSE:To achieve the improvement in optical performance by forming the protecting thin film of aluminum oxide which is chemically stable by a non-heating coating method to the end faces of the array. CONSTITUTION:An array 1 comprises disposing a plurality of focusing type optical transmission bodies 2 composed of slender cylindrical glass of about 1mm in diameter parallel in one or plural rows, filling the resin bonding materials 3 containing light absorbing material among the individual focusing type optical transmission bodies 2 and further protecting these by the spacers 4 on both sides and the side plates 5 made of resins and integrally forming these. Protecting thin films 6 are formed on the end faces of this array 1 by aluminum oxide being chemically stable metal oxide by a non-heating coating method. Such constitution enables optical performance to be maintained stably over a long period of time.

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