公开(公告)号：DE69841964D1

公开(公告)日：2010-12-02

申请号：DE69841964

申请日：1998-06-23

Applicant: MKS INSTR INC

Inventor： SMITH DONALD K ,  CHEN XING ,  HOLBER WILLIAM ,  GEORGELIS ERIC

IPC: H01J37/32 ,  H05H1/46 ,  H01J27/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：GB2435581A

公开(公告)日：2007-08-29

申请号：GB0710106

申请日：2007-05-25

Applicant: MKS INSTR INC

Inventor： HOLBER WILLIAM ,  CHEN XING

IPC: B01J12/00 ,  C23C16/452 ,  H01J37/32

Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.

公开(公告)号：DE69841965D1

公开(公告)日：2010-12-02

申请号：DE69841965

申请日：1998-06-23

Applicant: MKS INSTR INC

Inventor： SMITH DONALD K ,  CHEN XING ,  HOLBER WILLIAM ,  GEORGELIS ERIC

IPC: H01J37/32 ,  H05H1/46 ,  H01J27/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：DE69841963D1

公开(公告)日：2010-12-02

申请号：DE69841963

申请日：1998-06-23

Applicant: MKS INSTR INC

Inventor： SMITH DONALD K ,  CHEN XING ,  HOLBER WILLIAM ,  GEORGELIS ERIC

IPC: H01J37/32 ,  H05H1/46 ,  H01J27/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：GB2447381B

公开(公告)日：2010-02-24

申请号：GB0811517

申请日：2006-12-15

Applicant: MKS INSTR INC

Inventor： SCHUSS JACK J ,  HOLBER WILLIAM ,  SUMMERSON JOHN T ,  TRULLI SUSAN C ,  ZHANG WEIGUO ,  CHEN XING

IPC: H01J37/32

Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas (134) with a plasma(132) located in a chamber(108). A downstream gas input (176) is positioned relative to an output (172) of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas (152) does not substantially interact with an interior surface of the chamber.

公开(公告)号：DE69842259D1

公开(公告)日：2011-06-16

申请号：DE69842259

申请日：1998-06-23

Applicant: MKS INSTR INC

Inventor： SMITH DONALD K ,  CHEN XING ,  HOLBER WILLIAM ,  GEORGELIS ERIC

IPC: H01J37/32 ,  H05H1/46 ,  H01J27/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：DE69842098D1

公开(公告)日：2011-02-24

申请号：DE69842098

申请日：1998-06-23

Applicant: MKS INSTR INC

Inventor： SMITH DONALD K ,  CHEN XING ,  HOLBER WILLIAM ,  GEORGELIS ERIC

IPC: H01J37/32 ,  H05H1/46 ,  H01J27/16 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：GB2447381A

公开(公告)日：2008-09-10

申请号：GB0811517

申请日：2006-12-15

Applicant: MKS INSTR INC

Inventor： SCHUSS JACK J ,  HOLBER WILLIAM ,  SUMMERSON JOHN T ,  TRULLI SUSAN C ,  ZHANG WEIGUO ,  CHEN XING

IPC: H01J37/32

Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas (134) with a plasma(132) located in a chamber(108). A downstream gas input (176) is positioned relative to an output (172) of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas (152) does not substantially interact with an interior surface of the chamber.