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    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS
    1.
    发明申请
    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 审中-公开
    紧凑的可配置电源，用于提供生产臭氧的电池

    公开(公告)号：WO2013148410A3

    公开(公告)日：2013-12-19

    申请号：PCT/US2013032920

    申请日：2013-03-19

    Applicant: MKS INSTR INC

    Inventor： TRAN KEN ,  TIAN FENG ,  CHEN XING ,  LEE FRANKLIN

    IPC: C01B13/11 ,  H02M1/36 ,  H02M3/335 ,  H02M7/48 ,  H02M7/537 ,  H02M7/538

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

    Abstract translation: 使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。 以大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这样的单元供电的高压AC，同时允许减小组件尺寸并降低负载调整电路的品质因数 。 可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。 还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化，由从DC总线获得的测量值确定。 限流电阻可以是正温系数热敏电阻。

    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE
    3.
    发明申请
    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE 审中-公开
    用于等离子体设备的涂敷器和冷却系统

    公开(公告)号：WO2008042779A3

    公开(公告)日：2008-10-30

    申请号：PCT/US2007079903

    申请日：2007-09-28

    Applicant: MKS INSTR INC ,  SCHUSS JACK J ,  CHEN XING

    Inventor： SCHUSS JACK J ,  CHEN XING

    IPC: H05H1/24 ,  H01J37/32

    CPC classification number: H01J37/32522 ,  H01J37/32357

    Abstract: An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.

    Abstract translation: 提供有效冷却的改进的等离子体容器（即，等离子体施加器）包括具有通过介电连接器流体连接在一起的电介质内部的多个大致线性管。 管和连接器连接在一起形成密封的等离子体容器。 围绕改进的等离子体容器的冷却系统包括刚性冷却板和设置在等离子体容器和冷却板之间的可变形热传递材料。 在使用后或由操作员自行决定后，等离子体容器可以从冷却系统中取出，并且可以在其位置插入新的容器。 或者，使用过的容器可以翻新并重新插入冷却系统。 新的或翻新的船只可能与使用的船只尺寸或配置相同或不同。 然而，冷却系统与新的或翻新的容器之间的热接触通过可变形的热转印材料来保持。

    INDUCTIVELY-COUPLED PLASMA SOURCE
    4.
    发明申请
    INDUCTIVELY-COUPLED PLASMA SOURCE 审中-公开
    电感耦合等离子体源

    公开(公告)号：WO2008076629A3

    公开(公告)日：2008-08-14

    申请号：PCT/US2007086367

    申请日：2007-12-04

    Applicant: MKS INSTR INC ,  CHEN XING

    Inventor： CHEN XING

    IPC: H01J37/32 ,  H05H1/24 ,  H05H1/48

    CPC classification number: H05H1/46 ,  C03B19/143 ,  C03B37/0183 ,  C03B37/01861 ,  H01J37/321 ,  H01J37/32522 ,  H01J37/3266 ,  H05H2001/4652

    Abstract: A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electric field in the plasma vessel that generates the plasma.

    Abstract translation: 一种用于激发气体的方法和装置，其涉及通过限定间隙的磁芯单向产生交变磁场，跨越间隙并通过包括电介质材料的等离子体容器。 磁场在等离子体容器中产生产生等离子体的电场。

    PARTICLE TRAP FOR A PLASMA SOURCE
    5.
    发明申请
    PARTICLE TRAP FOR A PLASMA SOURCE 审中-公开
    用于等离子体源的颗粒捕获

    公开(公告)号：WO2009158249A3

    公开(公告)日：2014-09-25

    申请号：PCT/US2009047631

    申请日：2009-06-17

    Applicant: MKS INSTR INC ,  SHAJII ALI ,  CHEN XING ,  COWE ANDREW ,  BURTNER DAVID ,  ENTLEY WILLIAM ROBERT ,  SHAO SHOUQIAN

    Inventor： SHAJII ALI ,  CHEN XING ,  COWE ANDREW ,  BURTNER DAVID ,  ENTLEY WILLIAM ROBERT ,  SHAO SHOUQIAN

    IPC: H01J37/32

    CPC classification number: H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

    Abstract: A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

    Abstract translation: 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。

    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER
    6.
    发明申请
    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER 审中-公开
    化学离子反应或原子转移反应物质光谱仪具有四倍或时间的飞行质谱仪

    公开(公告)号：WO2009048739A3

    公开(公告)日：2009-11-26

    申请号：PCT/US2008077365

    申请日：2008-09-23

    Applicant: MKS INSTR INC ,  ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

    Inventor： ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

    IPC: H01J49/10 ,  H01J49/14

    CPC classification number: H01J49/105 ,  H01J49/145

    Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

    Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子，并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

    METHODS AND APPARATUS FOR DOWNSTREAM DISSOCIATION OF GASES
    9.
    发明申请
    METHODS AND APPARATUS FOR DOWNSTREAM DISSOCIATION OF GASES 审中-公开
    气田下游分离方法与装置

    公开(公告)号：WO2006060827A3

    公开(公告)日：2006-08-24

    申请号：PCT/US2005045426

    申请日：2005-12-02

    Applicant: MKS INSTR INC ,  HOLBER WILLIAM M ,  CHEN XING

    Inventor： HOLBER WILLIAM M ,  CHEN XING

    IPC: B01J12/00 ,  C23C16/452 ,  H01J37/32

    CPC classification number: B01J19/088 ,  B01J2219/0875 ,  C23C16/452 ,  H01J37/32357 ,  H01J37/3244

    Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.

    Abstract translation: 用于激活和解离气体的方法和装置包括用位于室中的等离子体产生活化气体。 下游气体输入端相对于腔室的输出定位，以使得活化气体能够促进由气体输入引入的下游气体的解离，其中解离的下游气体基本上不与腔室的内表面相互作用。

    A VERSATILE ZERO-VOLTAGE SWITCH RESONANT INVERTER FOR INDUSTRIAL DIELECTRIC BARRIER DISCHARGE GENERATOR APPLICATIONS
    10.
    发明公开
    A VERSATILE ZERO-VOLTAGE SWITCH RESONANT INVERTER FOR INDUSTRIAL DIELECTRIC BARRIER DISCHARGE GENERATOR APPLICATIONS 审中-公开
    越野车NULLSCHALTUNGS-SCHALTRESONANZWECHSELRICHTERFÜRINDUSTRIELLE GENERATORANWENDUNGEN MIT DIELEKTRISCHER SPERRENTLADUNG

    公开(公告)号：EP2834911A4

    公开(公告)日：2016-03-30

    申请号：EP13768401

    申请日：2013-03-18

    Applicant: MKS INSTR INC

    Inventor： TRAN KEN ,  CHEN XING ,  NEWMAN RUSSELL L ,  LEE FRANKLIN

    IPC: H02M7/48

    CPC classification number: H05B33/0803 ,  Y02B20/348

    Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.

    Abstract translation: 用于产生臭氧的电介质阻挡放电系统的电力系统可以包括全桥逆变级和并联谐振回路，输出用于为介质阻挡放电单元堆提供电力的信号。 使用脉冲宽度调制（PWM）和频率调制（FM）的组合来控制逆变器级，以实现从全负载到轻负载的所有负载条件下的软开关。 电流控制回路误差放大器补偿器可以向产生用于逆变器级的开关信号的相移PWM控制器芯片提供占空比调整信号。 反馈信号也用于调整PWM控制器芯片的时钟频率时间常数以提供FM。 在一个实施例中，反馈信号是连接在电流控制回路误差放大器补偿器的输出处的反相放大器的输出。

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