公开(公告)号：WO2007032826A2

公开(公告)日：2007-03-22

申请号：PCT/US2006029921

申请日：2006-07-28

Applicant: MKS INSTR INC ,  MENEGHINI PAUL ,  SMITH DANIEL ,  SHAJII ALI

Inventor： MENEGHINI PAUL ,  SMITH DANIEL ,  SHAJII ALI

CPC classification number: G05D11/133 ,  C23C16/4481 ,  C23C16/45512 ,  C23C16/52

Abstract: A system and method are described that control the amount of precursor that is delivered to a process chamber by precisely measuring the mole fraction of the gas mixture being delivered. A gas delivery system includes a delivery chamber, a precursor inlet valve, a carrier inlet valve, an outlet valve, and a controller. The controller controls the opening and closing of the precursor inlet valve, the carrier inlet valve, and the outlet valve, so as to introduce a desired amount of a precursor gas and a carrier gas into the delivery chamber, to generate a gas mixture having a desired mole fraction of the precursor gas, and to deliver to the process chamber the gas mixture having the desired mole fraction of the precursor gas.

Abstract translation: 描述了一种系统和方法，其通过精确测量被输送的气体混合物的摩尔分数来控制被输送到处理室的前体的量。 气体输送系统包括输送室，前体入口阀，载体入口阀，出口阀和控制器。 控制器控制前体入口阀，载体入口阀和出口阀的打开和关闭，以便将所需量的前体气体和载气引入到输送室中，以产生具有 前体气体的所需摩尔分数，并将具有所需前体气体摩尔分数的气体混合物输送到处理室。

公开(公告)号：WO2006055314A3

公开(公告)日：2006-08-10

申请号：PCT/US2005040280

申请日：2005-11-07

Applicant: MKS INSTR INC ,  SHAJII ALI ,  MENEGHINI PAUL

Inventor： SHAJII ALI ,  MENEGHINI PAUL

IPC: G01F5/00 ,  G01F1/684 ,  G01F1/696 ,  G01F15/04

CPC classification number: G01F15/046 ,  G01F1/6847 ,  G01F1/6965 ,  G01F5/00

Abstract: A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.

Abstract translation: 基于所有旁路误差都是雷诺数的函数的事实，质量流率传感器使用雷诺数校正函数来补偿所有气体的传感器的旁路比中的误差。 传感器包括传感器管和分流管的旁路管，其中传感器的旁路比等于通过传感器的总流量除以仅通过传感器管的流速。 加热器元件加热传感器管的上游部分和下游部分，并且电路连接到加热器元件，用于基于加热器元件之间的电阻差产生电压。 电压基于已知的参考气体流量进行校准，并且通过传感器的流量基于校准电压乘以多气体校正函数和雷诺数校正函数。

公开(公告)号：WO2009158249A3

公开(公告)日：2014-09-25

申请号：PCT/US2009047631

申请日：2009-06-17

Applicant: MKS INSTR INC ,  SHAJII ALI ,  CHEN XING ,  COWE ANDREW ,  BURTNER DAVID ,  ENTLEY WILLIAM ROBERT ,  SHAO SHOUQIAN

Inventor： SHAJII ALI ,  CHEN XING ,  COWE ANDREW ,  BURTNER DAVID ,  ENTLEY WILLIAM ROBERT ,  SHAO SHOUQIAN

IPC: H01J37/32

CPC classification number: H01J37/32357 ,  H01J37/32871 ,  Y10S55/15 ,  Y10T29/4935

Abstract: A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.

Abstract translation: 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。

公开(公告)号：WO2009048739A3

公开(公告)日：2009-11-26

申请号：PCT/US2008077365

申请日：2008-09-23

Applicant: MKS INSTR INC ,  ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

Inventor： ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

IPC: H01J49/10 ,  H01J49/14

CPC classification number: H01J49/105 ,  H01J49/145

Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子，并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

公开(公告)号：WO2005094404A2

公开(公告)日：2005-10-13

申请号：PCT/US2005002783

申请日：2005-02-01

Applicant: MKS INSTR INC ,  SHAJII ALI ,  NAGARKATTI SIDDHARTH

Inventor： SHAJII ALI ,  NAGARKATTI SIDDHARTH

IPC: C23F1/00 ,  F17D3/00

CPC classification number: G05D7/0664 ,  C23C16/45561 ,  C23C16/52 ,  Y10T137/0363 ,  Y10T137/2524

Abstract: A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.

Abstract translation: 一种用于将单个流分成两个或更多个期望比例的二次流的系统，包括适于接收单个流的入口，连接到入口的至少两个二次流线，适于接收至少一个期望比例的输入装置 至少一个原位过程监视器，其提供由每个流水线产生的产品的测量值，以及连接到输入设备和原位过程监控器的控制器。 控制器被编程为接收通过输入设备的期望流量比，从原位过程监控器接收产品测量值，并且基于所需的流量比和产品测量值来计算校正的流量比。 如果产品测量值不相等，则校正后的流量比将不同于所需的流量比。

公开(公告)号：JP2003263230A

公开(公告)日：2003-09-19

申请号：JP2002380308

申请日：2002-12-27

Applicant: MKS INSTR INC

Inventor： AMBROSINA JESSE ,  KOTTENSTETTE NICHOLAS ,  SHAJII ALI

IPC: G01F1/00 ,  G01F1/68 ,  G05D11/13

Abstract: PROBLEM TO BE SOLVED: To provide a system for dividing a single mass and flow to more than two secondary mass and flow with a predetermined ratio. SOLUTION: A system for dividing a single mass and flow includes an inlet designed for receiving the single mass and flow and at least two flow lines coupled to the entrance. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive desired flow ratio via a user interface, receive signals indicating measured flows from the flow meters, calculate an actual flow ratio of each flow line, based on the measured flows and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flows passing at least one of the each flow line and supply signals indicating the desired flows to at least one of the valves, if the actual ratios are not equal to the desired ratio. COPYRIGHT: (C)2003,JPO

公开(公告)号：WO2006101697A2

公开(公告)日：2006-09-28

申请号：PCT/US2006007752

申请日：2006-03-03

Applicant: MKS INSTR INC ,  MENEGHINI PAUL ,  SHAJII ALI ,  SMITH DANIEL ,  CLARK WILLIAM

Inventor： MENEGHINI PAUL ,  SHAJII ALI ,  SMITH DANIEL ,  CLARK WILLIAM

IPC: C23C16/448 ,  B01B1/00 ,  C23C16/455

CPC classification number: C23C16/4485

Abstract: A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve is opened. The means for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.

Abstract translation: 一种蒸发器，包括用于液体的入口和用于气体的出口，气体阀控制气体流向蒸发器的出口，以及用于加热在液体入口和气体阀之间流动的液体的装置。 蒸发器还包括用于增加在液体入口和气体阀之间流动的液体的传热速率并且用于引起液体中的压降的装置，使得液体的压力下降到液体的蒸汽过渡压力以下 到达气阀。 在等温条件下发生压降，仅当阀门打开时液体才能根据需要蒸发。 用于增加传热速率和引起压降的方法可以是多孔介质的塞子。

公开(公告)号：WO2005103728A2

公开(公告)日：2005-11-03

申请号：PCT/US2005006968

申请日：2005-03-03

Applicant: MKS INSTR INC ,  NAGARKATTI SIDDHARTH P ,  CLARK WILLIAM RANDOLPH ,  SHAJII ALI

Inventor： NAGARKATTI SIDDHARTH P ,  CLARK WILLIAM RANDOLPH ,  SHAJII ALI

IPC: G01F25/00 ,  G01P21/00

CPC classification number: G01F25/0053 ,  G01F25/0015

Abstract: A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of the chamber. The piston moves through the length of the chamber in response to fluid pressure exerted by the fluid flowing into the chamber. A piston actuator imparts motion to the piston, in response to command signals from a controller. The controller is responsive to the output of a pressure sensor, which senses the fluid pressure, and a position/velocity sensor, which senses the position and velocity of the piston. The controller commands the piston actuator to dynamically adjust the position and velocity of the piston so that the fluid pressure remains substantially constant at a desired setpoint.

Abstract translation: 提出了一种主动调节被测试流体的压力的流量测量校准系统和方法。 活塞可滑动地安装到腔室的内壁，该腔室具有用于接收流体流入腔室内部的流体入口端口。 响应于流入腔室的流体施加的流体压力，活塞移动通过腔室的长度。 响应于来自控制器的命令信号，活塞致动器将活动施加到活塞。 控制器响应检测流体压力的压力传感器的输出和检测活塞的位置和速度的位置/速度传感器。 控制器命令活塞致动器动态地调节活塞的位置和速度，使得流体压力保持基本恒定在期望的设定点。

公开(公告)号：WO2005098375A2

公开(公告)日：2005-10-20

申请号：PCT/US2005009800

申请日：2005-03-24

Applicant: MKS INSTR INC ,  SHAJII ALI ,  MENEGHINI PAUL ,  MYATT LEONARD

Inventor： SHAJII ALI ,  MENEGHINI PAUL ,  MYATT LEONARD

IPC: G01F1/68 ,  G01F1/684 ,  G01F5/00

CPC classification number: G01F1/6847 ,  G01F5/00

Abstract: A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a capillary tube for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. The capillary tube is disposed about a centerline, and includes an inner wall defined by an inside radius measured from the centerline. The inside radius varies periodically, preferably sinusoidally, along the centerline for at least a portion of the capillary tube, thereby forming a turbulated surface on the inner wall. The turbulated inner wall increases wall surface area, and fluid mixing. The resulting increased heat transfer rate decreases the error in sensor output from nonlinear behavior.

Abstract translation: 一种用于测量流体流量的质量流量传感器中的传感装置包括用于容纳流体流的主管道和用于在第一位置处从主管道中抽出流体流的一部分的毛细管， 该部分流体在第二位置流向导管。 毛细管围绕中心线布置，并且包括由从中心线测量的内径限定的内壁。 内部半径沿着毛细管的至少一部分的中心线周期性地，优选地正弦地变化，由此在内壁上形成紊流表面。 紊流的内壁增加了壁面积和流体混合。 由此产生的增加的传热速率减少了非线性行为导致的传感器输出误差。

公开(公告)号：GB2446358B

公开(公告)日：2011-05-04

申请号：GB0811130

申请日：2006-11-08

Applicant: MKS INSTR INC

Inventor： SHAJII ALI ,  NAGARKATTI SIDDHARTH P ,  HILL GORDON

IPC: G05D16/20 ,  F16K31/12 ,  F16K31/36 ,  G05D7/06 ,  H01L21/306

Abstract: A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.