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    METHOD AND APPARATUS FOR FLUORINE GENERATION AND RECIRCULATION
    1.
    发明申请
    METHOD AND APPARATUS FOR FLUORINE GENERATION AND RECIRCULATION 审中-公开
    用于荧光生成和再循环的方法和装置

    公开(公告)号：WO2004053198A2

    公开(公告)日：2004-06-24

    申请号：PCT/US2003/038721

    申请日：2003-12-04

    Applicant: MKS INSTRUMENTS, INC. ,  SMITH, Donald, K. ,  BESEN, Matthew, M. ,  HOLBER, William, M. ,  HORNE, Stephen, F.

    Inventor： SMITH, Donald, K. ,  BESEN, Matthew, M. ,  HOLBER, William, M. ,  HORNE, Stephen, F.

    IPC: C25B

    CPC classification number: B01J19/088 ,  B01J2219/00164 ,  B01J2219/0894 ,  C01B7/20

    Abstract: The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.

    Abstract translation: 本发明涉及氟的生成和再循环的设备和方法。 申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。 氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。 在一些实施方案中，包含氟的反应产物通过氟分离器。 在其它实施方案中，分离的氟单独地或与含氟的另外的原料结合使用到等离子体发生器。 氟分离器允许氟被再循环并且废物从系统中消除。

    ENERGY-DRIVEN, E.G. LASER-DRIVEN, LIGHT SOURCE
    3.
    发明申请
    ENERGY-DRIVEN, E.G. LASER-DRIVEN, LIGHT SOURCE 审中-公开
    能源驱动，E.G. 激光驱动，光源

    公开(公告)号：WO2010002766A3

    公开(公告)日：2010-03-04

    申请号：PCT/US2009049016

    申请日：2009-06-29

    Applicant: ENERGETIQ TECHNOLOGY INC ,  SMITH DONALD K ,  HOLBER WILLIAM M ,  CASEY JEFFERY A

    Inventor： SMITH DONALD K ,  HOLBER WILLIAM M ,  CASEY JEFFERY A

    IPC: H01J65/04 ,  F21V7/04

    CPC classification number: H01J65/04 ,  B82Y10/00 ,  G03F7/70033 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/008 ,  Y02B20/204

    Abstract: An apparatus for producing light includes a chamber (128) and optionally an ignition source (104, 140) that ionizes a gas within the chamber. The apparatus also includes an energy source at least one laser (104), that provides energy (124) to the ionized gas (132) within the chamber to produce a high brightness light (136). The apparatus may also comprise a reflector that reflects the light emitted through the walls of the chamber. The apparatus may also comprise a blocker suspended along a path the energy travels to block at least a portion of the energy.

    Abstract translation: 一种用于制造光的装置包括室（128）和可选地使电离室内的气体的点火源（104,140）。 该装置还包括能量源，至少一个激光器（104），其向腔室内的电离气体（132）提供能量（124）以产生高亮度光（136）。 该装置还可以包括反射通过室的壁发射的光的反射器。 该装置还可以包括沿能量传播的路径悬挂的阻挡块，以阻挡能量的至少一部分。

    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER
    4.
    发明申请
    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER 审中-公开
    化学离子反应或原子转移反应物质光谱仪具有四倍或时间的飞行质谱仪

    公开(公告)号：WO2009048739A3

    公开(公告)日：2009-11-26

    申请号：PCT/US2008077365

    申请日：2008-09-23

    Applicant: MKS INSTR INC ,  ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

    Inventor： ROBINSON TIMOTHY ROGER ,  ATTWOOD MARK ,  CHEN XING ,  HOLBER WILLIAM M ,  LONGSON MARK PHILIP ,  PALK JONATHAN HENRY ,  SHAJII ALI ,  SMITH JOHN A

    IPC: H01J49/10 ,  H01J49/14

    CPC classification number: H01J49/105 ,  H01J49/145

    Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

    Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子，并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER
    5.
    发明申请
    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE OR TIME-OF-FLIGHT MASS SPECTROMETER 审中-公开
    用四极或飞行时间质谱仪进行化学电离反应或质子转移反应的质谱分析

    公开(公告)号：WO2009048739A2

    公开(公告)日：2009-04-16

    申请号：PCT/US2008/077365

    申请日：2008-09-23

    Applicant: MKS INSTRUMENTS, INC. ,  ROBINSON, Timothy, Roger ,  ATTWOOD, Mark ,  CHEN, Xing ,  HOLBER, William, M. ,  LONGSON, Mark, Philip ,  PALK, Jonathan, Henry ,  SHAJII, Ali ,  SMITH, John, A.

    Inventor： ROBINSON, Timothy, Roger ,  ATTWOOD, Mark ,  CHEN, Xing ,  HOLBER, William, M. ,  LONGSON, Mark, Philip ,  PALK, Jonathan, Henry ,  SHAJII, Ali ,  SMITH, John, A.

    IPC: H01J49/10 ,  H01J49/14

    CPC classification number: H01J49/105 ,  H01J49/145

    Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

    Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 该系统和方法的应用也被公开用于检测痕量浓度的挥发性有机化合物。 微波或高频RF能量源使试剂蒸气的粒子电离以形成试剂离子。 试剂离子进入腔室，例如漂移腔室，以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 试剂离子和产物离子然后在电场的影响下离开腔室以供质谱仪模块检测。 该系统包括各种控制模块，用于设置系统参数值和分析模块，用于检测光谱测量过程中离子种类的质量和峰值强度值以及系统内的故障。

    METHOD AND APPARATUS FOR FLUORINE GENERATION AND RECIRCULATION
    6.
    发明申请
    METHOD AND APPARATUS FOR FLUORINE GENERATION AND RECIRCULATION 审中-公开
    用于荧光生成和再循环的方法和装置

    公开(公告)号：WO2004053198A3

    公开(公告)日：2005-03-31

    申请号：PCT/US0338721

    申请日：2003-12-04

    Applicant: MKS INSTR INC ,  SMITH DONALD K ,  BESEN MATTHEW M ,  HOLBER WILLIAM M ,  HORNE STEPHEN F

    Inventor： SMITH DONALD K ,  BESEN MATTHEW M ,  HOLBER WILLIAM M ,  HORNE STEPHEN F

    IPC: B01J19/08 ,  C01B7/20 ,  B01J19/24 ,  C25B1/24

    CPC classification number: B01J19/088 ,  B01J2219/00164 ,  B01J2219/0894 ,  C01B7/20

    Abstract: The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.

    Abstract translation: 本发明涉及氟的生成和再循环的设备和方法。 申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。 氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。 在一些实施方案中，包含氟的反应产物通过氟分离器。 在其它实施方案中，分离的氟单独地或与含氟的另外的原料结合使用到等离子体发生器。 氟分离器允许氟被再循环并且废物从系统中消除。

    RADIO FREQUENCY POWER DELIVERY SYSTEM
    9.
    发明申请
    RADIO FREQUENCY POWER DELIVERY SYSTEM 审中-公开
    无线电频率供电系统

    公开(公告)号：WO2007053569A1

    公开(公告)日：2007-05-10

    申请号：PCT/US2006/042360

    申请日：2006-10-31

    Applicant: MKS INSTRUMENTS, INC. ,  NAGARKATTI, Siddharth, P. ,  KISHINEVSKY, Michael ,  SHAJII, Ali ,  KALVAITIS, Timothy, E. ,  MCKINNEY, William, S. ,  GOODMAN, Daniel ,  HOLBER, William, M. ,  SMITH, John, A.

    Inventor： NAGARKATTI, Siddharth, P. ,  KISHINEVSKY, Michael ,  SHAJII, Ali ,  KALVAITIS, Timothy, E. ,  MCKINNEY, William, S. ,  GOODMAN, Daniel ,  HOLBER, William, M. ,  SMITH, John, A.

    IPC: H03H7/40

    CPC classification number: H03H7/40

    Abstract: A system (200) and method are provided for delivering power to a dynamic load (260). The system includes a power supply (210) providing DC power having a substantially constant power open loop response, a power amplifier (220) for converting the DC power to RF power, a sensor (240) for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system (250, 252) to modify the impedance of the power amplifier to at least a substantially matched impedance of the dynamic load (260), and a controller (230) for controlling the electrically controllable impedance matching system (200). The system (200) further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module (252) for determining power delivered to the dynamic load, (260) and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    Abstract translation: 提供了一种用于将功率传递给动态负载（260）的系统（200）和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源（210），用于将DC功率转换成RF功率的功率放大器（220），用于测量DC功率的电压，电流和相位角的传感器（240） 与RF功率相关联的电压和电流矢量;将电力可控阻抗匹配系统（250,252）修改成至少动态负载（260）的基本上匹配的阻抗的功率放大器的阻抗;以及控制器（230） 用于控制电可控阻抗匹配系统（200）。 所述系统（200）还包括用于确定由所述功率放大器输出的功率的传感器校准测量模块，用于确定输送到所述动态负载的功率的电子匹配系统校准模块（252）和用于计算功率的功率耗散模块 消耗在电可控阻抗匹配系统中。

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