公开(公告)号：JPH1119871A

公开(公告)日：1999-01-26

申请号：JP19983298

申请日：1998-06-30

Applicant: MOTOROLA INC

Inventor： JAMES A GROUTGODE ,  JAMES F BANEL

IPC: B24B55/12 ,  B01D37/00 ,  B01F15/04 ,  H01L21/306

Abstract: PROBLEM TO BE SOLVED: To provide a dilution tool and method reducing vaporization of volatile gas and preventing a hazard exposing a person in the vicinity in hazardous chemicals. SOLUTION: In a dilution tool 100 and a method, in order to remove residue from a semiconductor wafer, a solution is prepared with two fluids. The fluid, for forming the desired solution, is combined in a filter 130. A seal-less pump 141, 142 is driven by a common motor 143, even when a flow amount of the solution is changed, the fluid is pumped out by fixing ratio of each flow amount. Conductivity of the solution, for determining concentration, is measured by a conductivity meter 166.