公开(公告)号：JPH10313149A

公开(公告)日：1998-11-24

申请号：JP13140998

申请日：1998-04-23

Applicant: MOTOROLA INC

Inventor： JIANG WENBIN ,  RAMDANI JAMAL ,  MAIER S LEVY

IPC: H01S5/00 ,  H01S5/062 ,  H01S5/10 ,  H01S5/183 ,  H01S5/34 ,  H01S5/343 ,  H01S3/18

Abstract: PROBLEM TO BE SOLVED: To provide a VCSEL(vertical cavity surface emission laser) which can be used for a high-speed light communication and is high in reliability and a manufacturing method thereof. SOLUTION: A VCSEL 1O includes a substrate 12, a first mirror stack 14, and an active region 20 composed of a first cladding region 21 adjacent to the mirror stack 14, a second cladding region 25, and an island-like active structure 23 sandwiched in between the cladding regions 24 and 25, wherein the first mirror stack 14 is lattice-matched to the active region 20. The island- like active structure 23 includes island-like structures and a second mirror stack 26 lattice-matched to the second cladding region 25. The island-like active structure 23 is formed through, such a manner that material layers of different band gaps are epitaxially grown and then exposed to high temperatures into an island-like structure composed of separated materials of different band gaps.