公开(公告)号：US20130028286A1

公开(公告)日：2013-01-31

申请号：US13625161

申请日：2012-09-24

Applicant: Mattson Technology, Inc.

Inventor： Paul Janis Timans

IPC: G01J5/02 ,  G01K15/00

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

公开(公告)号：US10190915B2

公开(公告)日：2019-01-29

申请号：US14567631

申请日：2014-12-11

Applicant: Mattson Technology, Inc.

Inventor： Paul Janis Timans

IPC: G01J5/08 ,  G01J5/00 ,  G01J5/06 ,  G01J5/52 ,  G01J5/58 ,  H01L21/324 ,  H01L21/67 ,  G01J5/02

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

公开(公告)号：US20150092813A1

公开(公告)日：2015-04-02

申请号：US14567631

申请日：2014-12-11

Applicant: Mattson Technology, Inc.

Inventor： Paul Janis Timans

IPC: G01J5/08

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

Abstract translation: 公开了一种在热处理室中校准温度测量装置，例如高温计的方法和系统。 根据本发明，该系统包括将光能发射到包含在热处理室中的基板上的校准光源。 然后光检测器检测正在透过基板的光量。 然后使用检测到的光能量来校准在系统中使用的温度测量装置。

公开(公告)号：US08918303B2

公开(公告)日：2014-12-23

申请号：US13625161

申请日：2012-09-24

Applicant: Mattson Technology, Inc.

Inventor： Paul Janis Timans

IPC: G01J5/02 ,  G01J5/08 ,  G01J5/52 ,  G01J5/58 ,  H01L21/67 ,  H01L21/324 ,  G01J5/06 ,  G01J5/00

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

Abstract translation: 公开了一种在热处理室中校准温度测量装置，例如高温计的方法和系统。 根据本发明，该系统包括将光能发射到包含在热处理室中的基板上的校准光源。 然后光检测器检测正在透过基板的光量。 然后使用检测到的光能量来校准在系统中使用的温度测量装置。