公开(公告)号：US20130207004A1

公开(公告)日：2013-08-15

申请号：US13761189

申请日：2013-02-07

Applicant: Media Lario, S.R.L.

Inventor： Natale M. Ceglio ,  Daniel STEARNS ,  Jacques KOOLS ,  Giuseppe VALSECCHI ,  Fabio ZOCCHI ,  Riccardo BINDA

IPC: H05G2/00 ,  G02B5/20

CPC classification number: H05G2/005 ,  G02B5/203 ,  G02B19/0095 ,  G02B27/425 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70316 ,  G03F7/70575 ,  G03F7/70916 ,  G21K1/067 ,  H05G2/008 ,  G21K2201/06 ,  G21K2201/064

Abstract: Source-collector modules for use with EUV lithography systems are disclosed, wherein the source-collector modules employ a laser-produced plasma EUV radiation source and a grazing-incidence collector. The EUV radiation source is generated by first forming an under-dense plasma, and then irradiating the under-dense plasma with infrared radiation of sufficient intensity to create a final EUV-emitting plasma. The grazing incidence collector can include a grating configured to prevent infrared radiation from reaching the intermediate focus. Use of debris mitigation devices preserves the longevity of operation of the source-collector modules.

Abstract translation: 公开了用于EUV光刻系统的源极集电极模块，其中源极 - 集电极模块采用激光产生的等离子体EUV辐射源和放电入射收集器。 通过首先形成低密度等离子体，然后用足够强度的红外辐射照射低密度等离子体来产生EUV辐射源，以产生最终的EUV发射等离子体。 掠入射收集器可以包括被配置为防止红外辐射到达中间焦点的光栅。 使用碎片减轻装置可以保持源 - 收集器模块的使用寿命。

公开(公告)号：US20220146809A1

公开(公告)日：2022-05-12

申请号：US17433936

申请日：2020-02-17

Applicant: MEDIA LARIO S.R.L.

Inventor： Robert David BANHAM ,  Giuseppe VALSECCHI ,  Fabio MARIONI

IPC: G02B23/10 ,  G02B5/08

Abstract: A manufacturing method creates a type of telescope which is athermal, lightweight, optical quality for visible and IR applications. The method includes: a) optical mirrors being made by immersing a master, that is an optical component with a curvature opposite to the mirror required into an electrolytic bath where the applied current transfers metal ions and deposit them on the master, the cathode, as a layer, b) the layer being bonded by an adhesive, solder or any other attachment process to a mechanical reinforcing structure, c) after the hardening of the bond or glue, the thin layer being finally released from the master and having maintained the optical quality of the master. The master or mandrel can be cleaned and reused for repeating this method and manufacturing large series of telescopes.

公开(公告)号：US20220331836A1

公开(公告)日：2022-10-20

申请号：US17634472

申请日：2020-08-13

Applicant: ISTITUTO NAZIONALE DI ASTROFISICA ,  POLITECNICO DI MILANO ,  MEDIA LARIO S.R.L.

Inventor： Giovanni PARESCHI ,  Marta MAria CIVITANI ,  Giorgia SIRONI ,  Giuseppe VALSECCHI ,  Luca MAGAGNIN ,  Eugenio GIBERTINI

IPC: B05D5/06 ,  G21K1/06 ,  B05D7/24 ,  B05D3/06

Abstract: A method for applying a carbon-based reflective overcoating on a grazing incidence optical unit comprising a substrate and a coating of a high-density material chosen from the group comprising gold, platinum, iridium, palladium, rhodium, ruthenium, chrome and nickel or a low-density material such as carbon or B4C; the method comprises the step of treating the optical unit with a solution or gaseous phase containing at least one polymer precursor material to create the overcoating through absorption of the polymer material on the coating.

公开(公告)号：US20170233281A1

公开(公告)日：2017-08-17

申请号：US15519122

申请日：2015-10-12

Applicant: MEDIA LARIO S.R.L.

Inventor： Robert David BANHAM ,  Giuseppe VALSECCHI ,  Oberto CITTERIO

IPC: C03B23/035 ,  C03C27/04 ,  G02B5/10 ,  B29D11/00

Abstract: A process for forming an article having at least one precision surface is disclosed. The process includes providing a thin sheet in contact with a surface of a mandrel. The process then includes establishing a pressure differential between opposite sides of the thin sheet using a collapsible enclosure so that the thin sheet is drawn onto the mandrel surface, thereby causing the thin sheet to substantially conform to the shape of the mandrel surface. The shaped thin sheet is then secured to a support member to define the article. The article is then removed from the mandrel. The front surface of the thin sheet defines the precision surface of the article. A process for forming a dual-sided precision article is also disclosed, along with an adaptive optical system and method that employs the precision article.