公开(公告)号：EP0328869A2

公开(公告)日：1989-08-23

申请号：EP89100490.5

申请日：1989-01-12

Applicant: Microelectronics and Computer Technology Corporation

Inventor： Woodard, Ollie Clifton, Sr. ,  Ross, Andrew William

IPC: G01R31/28 ,  G01R31/305

CPC classification number: H01J37/045 ,  G01R31/305 ,  H01J2237/24507

Abstract: An electron beam testing apparatus for applying an electron beam to parts of an electronic component and measuring the secondary electrons released from the part including a secondary electron collector having a plurality of vertically extending screens with a detector positioned adjacent one of the screens. A different voltage is applied to each of the screens of the collector for collecting the secondary electrons over a large area. The apparatus may include a combination blanking and Faraday cup for metering the electron beam current when it is blanked. The apparatus may also be used to measure net work capacitance by measuring the time required to charge a network to a predetermined voltage.

Abstract translation: 一种电子束测试装置，用于将电子束施加到电子元件的部件上，并测量从包括具有多个垂直延伸的屏幕的二次电子收集器的部件释放的二次电子，其中检测器位于一个屏幕附近。 将不同的电压施加到收集器的每个屏幕上以在大面积上收集二次电子。 该装置可以包括组合消隐和法拉第杯，用于在消隐时测量电子束电流。 该装置也可以用于通过测量将网络充电到预定电压所需的时间来测量净功功率。

公开(公告)号：EP0328869B1

公开(公告)日：1994-03-30

申请号：EP89100490.5

申请日：1989-01-12

Applicant: Microelectronics and Computer Technology Corporation

Inventor： Woodard, Ollie Clifton, Sr. ,  Ross, Andrew William

IPC: G01R31/28 ,  G01R31/305

CPC classification number: H01J37/045 ,  G01R31/305 ,  H01J2237/24507

公开(公告)号：EP0328869A3

公开(公告)日：1991-06-12

申请号：EP89100490.5

申请日：1989-01-12

Applicant: Microelectronics and Computer Technology Corporation

Inventor： Woodard, Ollie Clifton, Sr. ,  Ross, Andrew William

IPC: G01R31/28 ,  G01R31/305

CPC classification number: H01J37/045 ,  G01R31/305 ,  H01J2237/24507

Abstract: An electron beam testing apparatus for applying an electron beam to parts of an electronic component and measuring the secondary electrons released from the part including a secondary electron collector having a plurality of vertically extending screens with a detector positioned adjacent one of the screens. A different voltage is applied to each of the screens of the collector for collecting the secondary electrons over a large area. The apparatus may include a combination blanking and Faraday cup for metering the electron beam current when it is blanked. The apparatus may also be used to measure net work capacitance by measuring the time required to charge a network to a predetermined voltage.