ZONE MELT RECRYSTALLIZATION FOR INORGANIC FILMS

    公开(公告)号:WO2009094124A3

    公开(公告)日:2009-07-30

    申请号:PCT/US2009/000301

    申请日:2009-01-16

    Abstract: ZMR apparatuses provide for controlled temperature flow through the system to reduce energy consumption while providing for desired crystal growth properties. The apparatus can include a cooling system to specifically remove a desired amount of heat from a melted film to facilitate crystallization. Furthermore, the apparatus can have heated walls to create a background temperature within the chamber that reduces energy use through the reduction or elimination of cooling for the chamber walls. The apparatuses and corresponding methods can be used with inorganic films directly or indirectly associated with a porous release layer that provides thermal insulation with respect to an underlying substrate. If the recrystallized film is removed from the substrate, the substrates can be reused. The methods can be used for large area silicon films with thicknesses from 2 microns to 100 microns, which are suitable for photovoltaic applications as well as electronics applications.

    REACTANT NOZZLES WITHIN FLOWING REACTORS
    10.
    发明申请
    REACTANT NOZZLES WITHIN FLOWING REACTORS 审中-公开
    流动反应器中的反应喷嘴

    公开(公告)号:WO2003086617A1

    公开(公告)日:2003-10-23

    申请号:PCT/US2003/010572

    申请日:2003-04-07

    CPC classification number: B01J19/26 B01J19/121 B01J19/127

    Abstract: Improved reaction chamber designs are described that provide for improved control over the flow within the reaction chamber (100). The reaction chamber (100) contains reactions for particle production from a flowing reactant stream. Improved reactant delivery nozzles (116) are described that are useful for the delivery of gas/vapor reactants and/or aerosol reactants. Improved nozzle designs can result in more uniform reactant flow. Suitable reactors can comprise an electromagnetic radiation source (134) that projects through the reactor to drive the reaction at an electromagnetic radiation reaction zone. The improved nozzle features are suitable for reactors for particle collection and/or for coating of substrates within the reaction chamber (100).

    Abstract translation: 描述了改进的反应室设计,其提供对反应室(100)内的流动的改进的控制。 反应室(100)含有从流动的反应物流产生颗粒的反应。 描述了改进的反应物输送喷嘴(116),其可用于输送气体/蒸汽反应物和/或气溶胶反应物。 改进的喷嘴设计可以导致更均匀的反应物流动。 合适的反应器可以包括电磁辐射源(134),其通过反应器突出以在电磁辐射反应区域驱动反应。 改进的喷嘴特征适用于用于在反应室(100)内进行颗粒收集和/或涂覆基材的反应器。

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