公开(公告)号：JPS63215942A

公开(公告)日：1988-09-08

申请号：JP4977687

申请日：1987-03-04

Applicant: NAT AEROSPACE LAB ,  TONICHI COMPUTER APURIKEESHIYO

Inventor： HAYASHI SHIGERU ,  SAITO TAKASHI ,  HORIUCHI MASAJI ,  TAKAHASHI TADASHI

IPC: G01N15/02 ,  H01L31/02 ,  H01L31/0352

Abstract: PURPOSE:To achieve a higher measuring accuracy and higher resolutions, by arranging partially circular photoelectric conversion elements as displaced circumferentially to eliminate a gap substantially in radial direction mutually. CONSTITUTION:In a photoelectric conversion sensor 21, photoelectric elements 22 (22i, 22i+1...) are partially circular in shape and arranged as displaced circumferentially. For example, the elements are so arranged that one element is displaced by 180 deg. from the adjacent one 22 to achieve coincidence between the inner radius of an (i)-th element 22i and the outer diameter of an (i-1)-th element 22i+1 while the outer radius of the element 22i coincides with the inner radius of the (i+1)-th element 22i+1. In other words, as a scattered light intensity pattern is concentrically circular in symmetry with the optical axis, the fact that each element 22 takes the partially circular shape causes no inconvenience while it can eliminate a gap between the elements 22 radially in actual efficiency thereby achieving a higher measuring accuracy and higher resolutions.

公开(公告)号：JPH06117825A

公开(公告)日：1994-04-28

申请号：JP21322692

申请日：1992-07-20

Applicant: NAT AEROSPACE LAB

Inventor： HAYASHI SHIGERU ,  HORIUCHI MASAJI

IPC: G01B11/08 ,  G01J1/02

Abstract: PURPOSE:To obtain a method and an apparatus for measuring the size of a linear or band-shaped object having several tens mum or smaller thickness or width. CONSTITUTION:A laser beam 2 is cast to a linear object measured 1 and a scattering light 3 is condensed by a lens 4. Supposing that (f) is the focal length of the lens, (r) is the distance of the light on a focal surface 5 from the focal point and I(r/f) indicates the intensity of the scattering light on the surface 5 at r/f, the diameter or width D of the linear body 1 is obtained from the position where I(r/f).(r/f) becomes maximum. In another way, the D is obtained by detecting the diameter or width when the sum of squares of the difference between the theoretical value Ert of the energy of the scattering light at the distance (r) and the actually-measured value Erm, i.e., SIGMA(Erm-Ert) becomes minimum.

公开(公告)号：JPH01284738A

公开(公告)日：1989-11-16

申请号：JP11309888

申请日：1988-05-10

Applicant: NAT AEROSPACE LAB

Inventor： HAYASHI SHIGERU ,  HORIUCHI MASAJI

IPC: G01N15/02 ,  G01N15/06 ,  G01N21/49

Abstract: PURPOSE:To measure particulate size and its distribution by irradiating parallel single-wavelength polarized luminous flux on a particulate or particulate group to be measured whose size is nearly equal or smaller than the wavelength of the light, and measuring the intensity of scattered light and scattering angle in the plane of polarization of the illumination light. CONSTITUTION:A helium neon laser 1 which emits linear polarized light irradiates the particulate group 2. Front scattered light is converted on the focal plane of a condenser lens 3 by the condenser lens 3 together with linear light to form a ring-shaped intensity distribution corresponding to the scattering angle. A beam expander 7 increases the beam width when the particulate group has a spatial spread. An array 4 of photoelectric converting elements for detecting parallel (i2) and an array 4' of photoelectric converting elements for detecting (i1) perpendicular to it are arranged at a convergence position and output signals corresponding to the intensity of scattered light in each direction. Then the particulate size and its distribution are measured from the angle distribution of the scattered light intensity.