公开(公告)号：JP2001108643A

公开(公告)日：2001-04-20

申请号：JP28565199

申请日：1999-10-06

Applicant: NAT AEROSPACE LAB

Inventor： MORIYA SHINICHI ,  TADANO MAKOTO ,  SATO MASAHIRO ,  KUMAGAI TATSUO ,  WILLIAM KUMETEIKU ,  KUSAKA KAZUO ,  SHINNO MASAYUKI

IPC: G01N25/72

Abstract: PROBLEM TO BE SOLVED: To provide an inspection system by which a face to be inspected can be inspected in a short time, with good efficiency and in a noncontact manner toy a continuous scanning operation without damaging and contaminating an object to be inspected and which can be applied even when the coating layer of the object to be inspected is thin. SOLUTION: A means by which the surface of an object to be inspected is irradiated with a laser beam is provided. A means wherein infrared rays radiated by a spot which is irradiated with the laser beam and which is heated are received so as to be input to an infrared radiation thermometer is provided. A scanning means wherein a sensor member on which the irradiation part of the laser beam and an infrared receiving part are arranged is scanned with reference to the surface of the object to be inspected is provided. A means by which the detected value of the infrared radiation thermometer is compared with standard data and by which the state of the coating layer of the object to be inspected is analyzed is provided.