Abstract:
PROBLEM TO BE SOLVED: To provide a diamond pn junction diode and a pin junction diode capable of emitting ultraviolet light. SOLUTION: An ohmic electrode is formed on a boron-doped p-type semiconductor diamond thin film (p-type layer) or an electroconductive substrate brought into contact with the thin film. A phosphorus-doped n-type semiconductor diamond thin film (n-type film) is formed directly or via an undoped diamond thin film on the surface of the p-type layer without being brought into contact with the ohmic electrode. An ohmic electrode is formed on the surface of the n-type layer without contacting the p-layer or the ohmic electrode formed on the p-layer.
Abstract:
The diamond semiconductor device is a diamond semiconductor device where a pair of electrodes are fixed on a diamond substrate, and wherein at least one interface to the electrode on the surface of the diamond substrate has a hydrogen termination and at least the surface of the substrate between the pair of two electrodes is controlled to have a larger electric resistivity value than inside the substrate. Accordingly, a diamond semiconductor device can be realized, capable of attaining the device work stability, especially the device work stability in severe environments such as high temperature with exhibiting the function of the hydrogen termination thereof to the utmost extent.